Analysis of optical constants of TiO<sub>2</sub> thin film based on in-situ common angle ellipsometry and reflection

SUN Xiaojuan; HAN Peigao; JUAN Fangying; HAO Dianzhong

doi:10.7510/jgjs.issn.1001-3806.2022.02.022

LASER TECHNOLOGY > 2022 > 46(2): 288-292. > DOI: 10.7510/jgjs.issn.1001-3806.2022.02.022

SUN Xiaojuan, HAN Peigao, JUAN Fangying, HAO Dianzhong. Analysis of optical constants of TiO₂ thin film based on in-situ common angle ellipsometry and reflection[J]. LASER TECHNOLOGY, 2022, 46(2): 288-292. DOI: 10.7510/jgjs.issn.1001-3806.2022.02.022

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Analysis of optical constants of TiO₂ thin film based on in-situ common angle ellipsometry and reflection

Department of Physics, College of Physical Engineering, Qufu Normal University, Qufu 273165, China

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Received Date: January 17, 2021
Revised Date: March 29, 2021
Published Date: March 24, 2022

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Abstract

Abstract

In order to analyze the optical constants of the TiO₂ thin film prepared by the sol-gel method, multi-layer TiO₂ thin films were prepared by spin-coating, and the surface morphology was analyzed by scanning electron microscopy. The refractive index dispersion and porosity of the film were analyzed by ellipsometry. The fitting analysis was carried out, and the fitting results were verified by in-situ common-angle reflectance spectroscopy. The TiO₂ thin film thickness, porosity, and refractive index dispersion curves were then obtained. The results show that the thickness of the TiO₂ thin film has a linear relationship with the number of spin coatings. The porosity of the film is about 15% and has nothing to do with the number of spin coatings. The New Amorphous dispersion model can fit the ellipsometric spectrum of TiO₂ thin film prepared by the sol-gel spin coating method in the 1.55eV~4.00eV band. This study provides a reference for the measurement of the optical constants of the TiO₂ thin film prepared by the sol-gel method.
- spectroscopy,
- optical constants,
- spectroscopic ellipsometry,
- TiO₂ thin film

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Analysis of optical constants of TiO₂ thin film based on in-situ common angle ellipsometry and reflection