Experimental study about laser etching fused silica based on barium compounds

CONG Qidong; YUAN Genfu; ZHANG Chen; GUO Baicheng

doi:10.7510/jgjs.issn.1001-3806.2018.03.012

LASER TECHNOLOGY > 2018 > 42(3): 351-356. > DOI: 10.7510/jgjs.issn.1001-3806.2018.03.012

CONG Qidong, YUAN Genfu, ZHANG Chen, GUO Baicheng. Experimental study about laser etching fused silica based on barium compounds[J]. LASER TECHNOLOGY, 2018, 42(3): 351-356. DOI: 10.7510/jgjs.issn.1001-3806.2018.03.012

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Experimental study about laser etching fused silica based on barium compounds

School of Mechanical Engineering, Jiangnan University, Wuxi 214122, China

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Received Date: July 18, 2017
Revised Date: August 29, 2017
Published Date: May 24, 2018

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Abstract

Abstract

In order to improve the absorption efficiency of ordinary pulsed infrared laser for fused silica, a new method for 1064nm infrared laser etching fused silica assisted by barium compound powder coating was proposed. The etching products adhering to the surface of the groove etched by laser assisted by BaCrO₄, BaCl₂, and Ba(OH)₂ powder coating were tested and analyzed by means of energy dispersive spectrometer (EDS) and X-ray diffraction (XRD) respectively. The results show that the etching mechanisms of BaCrO₄ and Ba(OH)₂ powder have the chemical reaction to remove quartz glass and the corrosion rates are high. The etching mechanism of BaCl₂ powder has no chemical reaction to remove quartz glass and the corrosion rate is low. The study provides the technical basis for the industrial application of laser processing fused silica.
- laser technique,
- laser etching,
- barium compound,
- powder coating,
- fused silica

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