Process study on KDP crystal polished by picosecond laser

HAN Xiaohua; DENG Leimin; WU Baoye; BAI Keqiang; ZHOU Xiang; LIU Peng; DUAN Jun

doi:10.7510/jgjs.issn.1001-3806.2018.02.005

LASER TECHNOLOGY > 2018 > 42(2): 166-171. > DOI: 10.7510/jgjs.issn.1001-3806.2018.02.005

HAN Xiaohua, DENG Leimin, WU Baoye, BAI Keqiang, ZHOU Xiang, LIU Peng, DUAN Jun. Process study on KDP crystal polished by picosecond laser[J]. LASER TECHNOLOGY, 2018, 42(2): 166-171. DOI: 10.7510/jgjs.issn.1001-3806.2018.02.005

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Process study on KDP crystal polished by picosecond laser

1.
Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China
2.
Department of Electrical and Computer Engineering, University of Nebraska, Lincoln NE 68588, USA

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Received Date: May 22, 2017
Revised Date: August 16, 2017
Published Date: March 24, 2018

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Abstract

Abstract

In order to improve the difficulty and low efficiency of precision machining of KDP crystal, picosecond ultrafast laser was used in KDP crystal polishing. The influence of the factors of laser wavelength, pulse energy density, laser beam incident angle, overlapping rate, scan mode and laser focal depth on laser polishing quality of KDP crystal was studied. The interaction mechanism of laser and KDP crystal was analyzed. The experimental results show that, with the optimal parameters, such as, picosecond laser wavelength λ of 355nm, focal length f of 56mm, laser beam incident angle α of 84°, laser repetition frequency F of 800kHz, pulse energy density Q of 2.4J/cm², overlapping rate O of 60%, 45° multi direction cross scanning and processing times T of 10, root mean square of surface roughness of KDP crystal can reach 76nm. The results add the supplements for the research of laser polishing technology.
- laser technique,
- laser polishing,
- process study,
- KDP crystal,
- surface roughness

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References

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