Study on 9.3μm RF exited slab waveguide CO<sub>2</sub> laser

ZHANG Peng; REN Ning; LIN Shouli; XU Jinzhong

doi:10.7510/jgjs.issn.1001-3806.2017.06.009

In order to obtain 9.3μm laser output, the small signal gain coefficients of 5 kinds of CO₂ isotopes were compared. After theoretical analysis and experimental verification, isotope gas ¹²C¹⁸O₂ was chosen as the working medium and laser output of 9.3μm was obtained. After the optimization of the working pressure of the laser, the maximum 96W power output was obtained under 10.00kPa working pressure. The results show that high power laser output can be obtained when the central wavelength of ¹²C¹⁸O₂ is near 9.3μm. The study is helpful to localize 9.3μm CO₂ laser and improve the localization rate of core components.

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引言

CO₂激光器的激光功率输出范围从几十毫瓦到几万瓦，现在已经发现有数百支谱线输出，在工业、军事、医疗、科研等领域得到了广泛的应用^[1-5]。封离型射频激励扩散冷却板条波导CO₂激光器，由于具有效率高、易于调制、工作寿命长、免维护等优点，中低功率的CO₂激光器越来越多地采用此结构^[6-9]。普通工作介质的CO₂激光器输出波长为10.6μm，在切割、表面信息标记等方面得到了广泛的应用。随着CO₂激光器应用范围的扩展，发现聚对苯二甲酸乙二酯(polyethylene terephthalate，PET)、聚酯酰胺薄膜等，其10.6μm波长的吸收率不如9.3μm波长吸收率高。激光作为一种先进加工手段，要求精细化加工，聚焦光斑的直径尽量小。影响聚焦光斑直径的因素有:光束质量、聚焦镜焦距、激光波长。在其它条件相同的情况下，9.3μm波长得到的聚焦光斑直径比10.6μm波长的约小13%。

国内外对9.3μm激光器已经开展了广泛的研究。主要分为两种方式:一种为采用同位素气体; 一种为谱线选支。在国内使用横向激励高气压(transversely excited atmospheric, TEA)CO₂激光器，使用腔镜镀膜选支的方法，得到了9.3μm激光器的输出^[10-13]。国外已经出现了商用的9.3μm激光器，国内还没有相应的商用9.3μm激光器。

4. 结论

¹²C¹⁸O₂的10⁰0→02⁰0波段P支谱线的小信号增益最大，其激光输出波长为9.3μm。利用¹²C¹⁸O₂代替¹²C¹⁶O₂作为工作介质，在腔镜反射率对9.3μm和10.6μm反射都大于99%的情况下，获得了9.3μm波长的激光输出。通过气压优化实验工作，得到了此激光器的最佳工作气压为10.00kPa，并在此气压下获得了最大96W的9.3μm波长激光输出，注入射频功率和激光输出效率比达到了14%。

Reference (16)

[1]	ZHOU B K, GAO Y Zh, CHEN T R, et al. Principles of lasers[M]. 6th ed. Beijing: National Defense Industry Press, 2009: 282-286(in Chinese).
[2]	WANG Y F, WU J, LIU Sh M. Tunable characteristic of long pulse TE CO₂ laser[J]. Infrared and Laser Engineering, 2008, 37(2): 226-229.
[3]	CHENG Y Q. Investigation on rapidly tunable technology of grating lines selection TEA CO₂ laser [D]. Beijing: Chinese Academy of Sciences, 2006: 5-14(in Chinese).
[4]	LI Sh M, HUANG W L. The principles and design of laser devices [M]. Beijing: National Defense Industry Press, 2005:61-71(in Ch-inese).
[5]	YU K X, JIANG T L, ZHAO Q D.Laser principles and laser techniques[M]. Beijing: Beijing University of Technology Press, 1998:76-101(in Chinese).
[6]	XIE J J, LI D J, ZHANG C Sh. Acousto-optically Q-switched CO₂ laser[J]. Optics and Precision Engineering, 2009, 17(5): 1008-1013.
[7]	LIAO J M, LI Y D, LI Zh H. Multi-frequency transversely excited atmospheric pressure CO₂ laser[J]. High Power Laser and Particle Beams, 2009, 21(10): 1459-1461.
[8]	XU D F, LI Y D, CHEN M. Theotetic model of same space dual-wavelength tunable TEA CO₂ laser[J]. Infrared and Laser Engineering, 2008, 38(5): 441-444.
[9]	YAN T, GUO H P, WANG Zh. Research on unstable-waveguide hybrid resonator of parabolic mirrors for 3kW radio frequency slab CO₂ laser[J]. Laser Technology, 2016, 40(6): 796-800.
[10]	SHAO Ch L, SONG X F, ZHANG L M. High power TEA CO₂ laser with two wavelength free shift output structure[J]. Optics and Precision Engineering, 2011, 19(2): 429-436. doi: 10.3788/OPE.
[11]	SHAO Ch L, YANG G L, LI D J. 9. 3μm branch selection research of high power pulse CO₂ laser[J]. Journal of Chinese Lasers, 2011, 38(3): 40-45.
[12]	SONG X F, SHAO C L, GUO J. Two-wavelength laser switching output technology in high power TEA CO₂ laser[J]. High Power and Particle Beams, 2011, 23(2): 303-307. doi: 10.3788/HPLPB
[13]	GUO J, LI D J, WANG T F, et al. High power CO₂ laser and its application technology[M]. Beijing: Science Press, 2013: 82-91(in Chinese).
[14]	ZHANG L L. Research on a miniature tunable isotope TEA ¹³C¹⁶O₂ laser[D]. Harbin: Harbin Institute of Technology, 2008: 1-7(in Chinese).
[15]	FREED L E, FREED C, O'DONNELL R G. Small signal gain and saturation intensity of 00⁰1-[10⁰0, 02⁰0]_{Ⅰ and Ⅱ} vibrational band transitions in sealed-off CO₂ isotope lasers[J]. IEEE Journal of Quantum Electronics, 1982, 18(8): 1229-1236. doi: 10.1109/JQE.1982.1071683
[16]	SILVER M, HARTIWICK T S, POSAKONY M J. Gain measurements in CO₂ isotope lasers[J]. Journal of Applied Physics, 1970, 41(11): 4566-4568. doi: 10.1063/1.1658497

band	parameter	¹²C¹⁶O₂	¹²C¹⁸O₂	¹³C¹⁶O₂	¹³C¹⁸O₂	¹⁴C¹⁶O₂
Ⅰ	α₀/10^-2cm^-1	1.07	0.3	0.64	0.42	0.55
Ⅰ	I_s/(W·cm^-2)	47	30	38	39	56
Ⅱ	α₀/10^-2cm^-1	0.9	0.73	0.26	0.42	0.099
Ⅱ	I_s/(W·cm^-2)	25	39	9	32	-3
measured	α_{0, Ⅰ}/α_{0, Ⅱ}	1.2	0.4	2.5	1.0	5.6
calculated	K_Ⅰ/K_Ⅱ	1.4	0.5	3.2	1.0	7.1

band	transition	α₀/10^-2cm^-1	I_s/(W·cm^-2)	α₀ I_s/(W·cm^-3)
Ⅰ	P(28)	0.27	22	0.060
	P(24)	0.30	24	0.071
	P(20)	0.30	30	0.091
	P(16)	0.28	24	0.069
	P(14)	0.24	22	0.052
	R(12)	0.24	23	0.054
	R(16)	0.26	27	0.071
	R(20)	0.27	29	0.079
	R(24)	0.26	22	0.059
	R(28)	0.23	20	0.047
Ⅱ	P(28)	0.66	30	0.20
	P(24)	0.71	34	0.24
	P(20)	0.73	39	0.28
	P(16)	0.67	36	0.24
	P(14)	0.60	25	0.15
	R(12)	0.60	28	0.17
	R(16)	0.64	30	0.19
	R(20)	0.64	33	0.21
	R(24)	0.62	31	0.19
	R(28)	0.50	28	0.14

Study on 9.3μm RF exited slab waveguide CO₂ laser

Abstract

References

Proportional views

通讯作者: 陈斌, bchen63@163.com

Proportional views

Study on 9.3μm RF exited slab waveguide CO₂ laser

HTML

3.1. 激光输出波长

3.2. 气压优化

Catalog

[1]	ZHOU B K, GAO Y Zh, CHEN T R, et al. Principles of lasers[M]. 6th ed. Beijing: National Defense Industry Press, 2009: 282-286(in Chinese).
[2]	WANG Y F, WU J, LIU Sh M, et al. Tunable characteristic of long pulse TE CO₂ laser[J]. Infrared and Laser Engineering, 2008, 37(2):226-229(in Chinese).
[3]	CHENG Y Q. Investigation on rapidly tunable technology of grating lines selection TEA CO₂ laser [D]. Beijing: Chinese Academy of Sciences, 2006: 5-14(in Chinese).
[4]	LI Sh M, HUANG W L. The principles and design of laser devices [M]. Beijing: National Defense Industry Press, 2005:61-71(in Ch-inese).
[5]	YU K X, JIANG T L, ZHAO Q D.Laser principles and laser techniques[M]. Beijing: Beijing University of Technology Press, 1998:76-101(in Chinese).
[6]	XIE J J, LI D J, ZHANG C Sh, et al. Acousto-optically Q-switched CO₂ laser[J]. Optics and Precision Engineering, 2009, 17(5):1008-1013(in Chinese).
[7]	LIAO J M, LI Y D, LI Zh H, et al. Multi-frequency transversely excited atmospheric pressure CO₂ laser [J]. High Power Laser and Particle Beams, 2009, 21(10): 1459-1461(in Chinese).
[8]	XU D F, LI Y D, CHEN M. Theotetic model of same space dual-wavelength tunable TEA CO₂ laser [J]. Infrared and Laser Engineering, 2008, 38(5):441-444(in Chinese).
[9]	YAN T, GUO H P, WANG Zh, et al. Research on unstable-waveguide hybrid resonator of parabolic mirrors for 3kW radio frequency slab CO₂ laser [J]. Laser Technology, 2016, 40(6):796-800(in Chinese).
[10]	SHAO Ch L, SONG X F, ZHANG L M, et al. High power TEA CO₂ laser with two wavelength free shift output structure[J]. Optics and Precision Engineering, 2011, 19(2):429-436(in Chinese). doi: 10.3788/OPE.
[11]	SHAO Ch L, YANG G L, LI D J, et al. 9. 3μm branch selection research of high power pulse CO₂ laser[J]. Journal of Chinese Lasers, 2011, 38(3):40-45(in Chinese).
[12]	SONG X F, SHAO C L, GUO J, et al. Two-wavelength laser switching output technology in high power TEA CO₂ laser[J]. High Power and Particle Beams, 2011, 23(2): 303-307(in Chinese). doi: 10.3788/HPLPB
[13]	GUO J, LI D J, WANG T F, et al. High power CO₂ laser and its application technology[M]. Beijing: Science Press, 2013: 82-91(in Chinese).
[14]	ZHANG L L. Research on a miniature tunable isotope TEA ¹³C¹⁶O₂ laser[D]. Harbin: Harbin Institute of Technology, 2008: 1-7(in Chinese).
[15]	FREED L E, FREED C, O'DONNELL R G, et al. Small signal gain and saturation intensity of 00⁰1-[10⁰0, 02⁰0]_{Ⅰ and Ⅱ} vibrational band transitions in sealed-off CO₂ isotope lasers [J]. IEEE Journal of Quantum Electronics, 1982, 18(8): 1229-1236. doi: 10.1109/JQE.1982.1071683
[16]	SILVER M, HARTIWICK T S, POSAKONY M J. Gain measurements in CO₂ isotope lasers [J]. Journal of Applied Physics, 1970, 41(11): 4566-4568. doi: 10.1063/1.1658497

Study on 9.3μm RF exited slab waveguide CO2 laser

Abstract

References

Proportional views

通讯作者: 陈斌, bchen63@163.com

Proportional views

Study on 9.3μm RF exited slab waveguide CO2 laser

HTML

3.1. 激光输出波长

3.2. 气压优化

Catalog

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Study on 9.3μm RF exited slab waveguide CO₂ laser

Study on 9.3μm RF exited slab waveguide CO₂ laser