ANSYS analysis of force-electric conversion of floating diaphragm for GaN-based micro-cavity sensors

ZHU Yanxu; DU Zhijuan; LIU Feifei; YU Ning; WANG Yuehua; SONG Huihui; WANG Honghang

doi:10.7510/jgjs.issn.1001-3806.2016.06.004

LASER TECHNOLOGY > 2016 > 40(6): 791-795. > DOI: 10.7510/jgjs.issn.1001-3806.2016.06.004

ZHU Yanxu, DU Zhijuan, LIU Feifei, YU Ning, WANG Yuehua, SONG Huihui, WANG Honghang. ANSYS analysis of force-electric conversion of floating diaphragm for GaN-based micro-cavity sensors[J]. LASER TECHNOLOGY, 2016, 40(6): 791-795. DOI: 10.7510/jgjs.issn.1001-3806.2016.06.004

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ANSYS analysis of force-electric conversion of floating diaphragm for GaN-based micro-cavity sensors

1.
Beijing Optoelectronic Technology Laboratory, Beijing University of Technology, Beijing 100124, China;
2.
State Key Laboratory of Electronic Thin Films and Integrated Devices, Zhongshan Institute, University of Electronic Science and Technology of China, Zhongshan 528400, China

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Received Date: October 07, 2015
Revised Date: November 25, 2015
Published Date: November 24, 2016

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Abstract

Abstract

In order to figure out piezoelectric effect and mechanical properties of GaN film, a physics-based model was proposed in this study. Based on the theory that gas absorbed infrared directly, micro-cavity infrared sensor with GaN/AlGaN floating membrane was put as background and AlGaN/GaN floating membrane was put as sensitive element. After theoretical analysis and experimental verification of materials mechanics and piezoelectric effect by using finite element analysis software ANSYS 14.0, datas of the logical relationship between output voltage, membrane sensitivity and shapes, thickness, area were gotten, and the feasibility of membrane force-electric signal conversion mechanism was verified. The results show that GaN film has good piezoelectric performance and linearity which make a good contribution to forecast the sensor output signal accurately and make temperature compensation. The proposed model is useful to make a theoretical foundation for better design of micro cavity infrared sensor with good performance and high sensitivity.
- thin films,
- output voltage,
- ANSYS 14.0,
- mechanical force,
- piezoelectic effect

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