ELA-beam shaping systems for flat panel display prepared by LTPS

YIN Guangyue; YOU Libing; FANG Xiaodong

doi:10.7510/jgjs.issn.1001-3806.2016.03.017

The advantages to poly silicon film instead of amorphous silicon film in the field of flat panel display were introduced. Crystallization process of poly silicon film by using excimer laser crystallization system was studied. The principle of how lens array achieve the uniformity of output laser energy density was described. The structure of typical excimer laser annealing(ELA) line beam shaping system, which included beam expanding unit, beam energy homogenizing unit, projection unit and so on was focused on. Finally the application of sequential lateral solidification technology in the area of low temperature poly silicon(LTPS) using excimer laser nnealing was introduced. The status of ELA optical system was discussed and its significance in flat panel display industry was pointed out.

ELA-beam shaping systems for flat panel display prepared by LTPS

Corresponding author: FANG Xiaodong, xdfang@aiofm.ac.cn

1. Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Science, Hefei 230031, China

Received Date: 2015-03-25

Accepted Date: 2015-04-07

Available Online: 2016-05-25

Abstract: The advantages to poly silicon film instead of amorphous silicon film in the field of flat panel display were introduced. Crystallization process of poly silicon film by using excimer laser crystallization system was studied. The principle of how lens array achieve the uniformity of output laser energy density was described. The structure of typical excimer laser annealing(ELA) line beam shaping system, which included beam expanding unit, beam energy homogenizing unit, projection unit and so on was focused on. Finally the application of sequential lateral solidification technology in the area of low temperature poly silicon(LTPS) using excimer laser nnealing was introduced. The status of ELA optical system was discussed and its significance in flat panel display industry was pointed out.

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Reference (18)

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ELA-beam shaping systems for flat panel display prepared by LTPS

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