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YIN Guangyue, YOU Libing, FANG Xiaodong. ELA-beam shaping systems for flat panel display prepared by LTPS[J]. LASER TECHNOLOGY, 2016, 40(3): 383-387. DOI: 10.7510/jgjs.issn.1001-3806.2016.03.017
Citation: YIN Guangyue, YOU Libing, FANG Xiaodong. ELA-beam shaping systems for flat panel display prepared by LTPS[J]. LASER TECHNOLOGY, 2016, 40(3): 383-387. DOI: 10.7510/jgjs.issn.1001-3806.2016.03.017
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ELA-beam shaping systems for flat panel display prepared by LTPS

  • Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Science, Hefei 230031, China

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  • Received Date: March 24, 2015
  • Revised Date: April 06, 2015
  • Published Date: May 24, 2016
    Graphical Abstract
    • Abstract
  • The advantages to poly silicon film instead of amorphous silicon film in the field of flat panel display were introduced. Crystallization process of poly silicon film by using excimer laser crystallization system was studied. The principle of how lens array achieve the uniformity of output laser energy density was described. The structure of typical excimer laser annealing(ELA) line beam shaping system, which included beam expanding unit, beam energy homogenizing unit, projection unit and so on was focused on. Finally the application of sequential lateral solidification technology in the area of low temperature poly silicon(LTPS) using excimer laser nnealing was introduced. The status of ELA optical system was discussed and its significance in flat panel display industry was pointed out.
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    • References (18)
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