Study on laser-induced chemical liquid deposition Fe film

HOU Zhanjie; TANG Xing; LUO Muwei; WANG Zhen; LI Yunbo; ZHU Yubin

doi:10.7510/jgjs.issn.1001-3806.2016.01.030

To deposit Fe film with smooth surface, accurate dimension, deposition area of optional nature, a YAG solid-state laser was used, Fe(CO)5 was used as liquid precursor and a certain thickness quartz plate was adopted to reduce byproducts. At the condition of laser power density of 1.0106W/cm2, laser frequency of 2.5kHz, laser scanning speed of 300mm/s and scan repetition of 200 times, a Fe layer in a certain thickness was deposited with better surface flatness. Experimental results show that laser power density influences surface quality of deposition layer stronger. Laser power intensity is one of the most important parameters determining whether the layer is deposited or not and the thickness of the layer. The results show that by laser-induced and using Fe(CO)5 as precursor, Fe film deposition can be achieved on copper surfaces.

Study on laser-induced chemical liquid deposition Fe film

Corresponding author: ZHU Yubin, ybzhu@shu.edu.cn

1. Department of Electronic Information, School of Materials Science and Engineering, Shanghai University, Shanghai 200436, China

Received Date: 2014-12-18

Accepted Date: 2015-01-20

Available Online: 2016-01-25

Abstract: To deposit Fe film with smooth surface, accurate dimension, deposition area of optional nature, a YAG solid-state laser was used, Fe(CO)5 was used as liquid precursor and a certain thickness quartz plate was adopted to reduce byproducts. At the condition of laser power density of 1.0106W/cm2, laser frequency of 2.5kHz, laser scanning speed of 300mm/s and scan repetition of 200 times, a Fe layer in a certain thickness was deposited with better surface flatness. Experimental results show that laser power density influences surface quality of deposition layer stronger. Laser power intensity is one of the most important parameters determining whether the layer is deposited or not and the thickness of the layer. The results show that by laser-induced and using Fe(CO)5 as precursor, Fe film deposition can be achieved on copper surfaces.

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Reference (15)

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Study on laser-induced chemical liquid deposition Fe film

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