Study on laser-induced chemical liquid deposition Fe film

HOU Zhanjie; TANG Xing; LUO Muwei; WANG Zhen; LI Yunbo; ZHU Yubin

doi:10.7510/jgjs.issn.1001-3806.2016.01.030

LASER TECHNOLOGY > 2016 > 40(1): 136-140. > DOI: 10.7510/jgjs.issn.1001-3806.2016.01.030

HOU Zhanjie, TANG Xing, LUO Muwei, WANG Zhen, LI Yunbo, ZHU Yubin. Study on laser-induced chemical liquid deposition Fe film[J]. LASER TECHNOLOGY, 2016, 40(1): 136-140. DOI: 10.7510/jgjs.issn.1001-3806.2016.01.030

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Study on laser-induced chemical liquid deposition Fe film

Department of Electronic Information, School of Materials Science and Engineering, Shanghai University, Shanghai 200436, China

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Received Date: December 17, 2014
Revised Date: January 19, 2015
Published Date: January 24, 2016

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Abstract

Abstract

To deposit Fe film with smooth surface, accurate dimension, deposition area of optional nature, a YAG solid-state laser was used, Fe(CO)5 was used as liquid precursor and a certain thickness quartz plate was adopted to reduce byproducts. At the condition of laser power density of 1.0106W/cm2, laser frequency of 2.5kHz, laser scanning speed of 300mm/s and scan repetition of 200 times, a Fe layer in a certain thickness was deposited with better surface flatness. Experimental results show that laser power density influences surface quality of deposition layer stronger. Laser power intensity is one of the most important parameters determining whether the layer is deposited or not and the thickness of the layer. The results show that by laser-induced and using Fe(CO)5 as precursor, Fe film deposition can be achieved on copper surfaces.
- laser technique,
- chemical liquid deposition,
- byproduct,
- laser power density,
- deposition layer thickness,
- Fe(CO)5

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