Study on wide spectrum characteristics of TiO2 film with ellipsometry
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College of Electrical & Information Engineering, Southwest University for Nationalities, Chengdu 610041, China;
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2.
Southwest Institute of Technical Physics, Chengdu 610041, China
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Corresponding author:
XIAO Jun, xiaojun@swun.cn
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Received Date:
2014-09-03
Accepted Date:
2015-01-07
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Abstract
In order to obtain optical constants of TiO2 thin film, single-layer TiO2 film deposited on K9 glass with an optical automatic vacuum coating machine was measured and analyzed with a SE850 broadband ellipsometer produced by SENTECH, Germany, and the optical constant curve and thickness of TiO2 thin film in 300nm~2500nm spectrum were obtained. Based on the film characteristics and film forming characteristics of TiO2 film, taking the influence of the intermix layer and rough surface layer into account, models were set up with Cauchy index model and Tauc-Lorentz model and the measurement data were analyzed and compared. The smallest mean square error of 0.5544 was obtained with a so called model of substrate/Tauc-Lorentz model/rough surface layer. The measured TiO2 thickness was closest to calculation value of TFCalc software. The results have certain reference value for the design and preparation of TiO2 thin multilayer film.
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