Study on periodic structures on Si surface induced by femtosecond laser
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Shandong Provincial Key Laboratory of Laser Polarization and Information Technology, Institute of Laser Research, Qufu Normal University, Qufu 273165, China
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Corresponding author:
YAN Kezhu, yankezhu@126.com
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Received Date:
2014-04-10
Accepted Date:
2014-05-24
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Abstract
In order to study periodic structures on Si surface induced by femtosecond laser, the relationship between the ripple period and the incident laser wavelength was analyzed. After theoretical analysis and experimental verification, the ripple period of monocrystalline silicon was calculated to be about 800nm. The ripple structures irradiated by 1kHz femtosecond pulses (center wavelength of 800nm, pulse width of 35fs) were studied. The results show that a set of liner ripple structure with parallel and equal spaces is found on the silicon surface irradiated by pulse laser under the condition that power density is slightly higher than damage threshold of the workpiece. The period of ripples is about 750nm by measurement, close to the center wavelength of laser. When the polarization direction of incident laser is changed by a rotatable Glan-Taylor prism, the direction of periodic ripples is changed accordingly. The direction of ripple is perpendicular to the electric vector direction of the femtosecond laser. The processing images show that the irradiated area is much cleaner than the non-irradiated area. The investigation is significant for further study of laser-induced periodic surface structures.
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References
|
[1]
|
ZHOU M, YUAN D Q,LI J, et al. Microand nano-structures on metal induced by fentosecond laser radiation[J].Spectroscopy and Spectral Analysis, 2009,29(6): 1454-1458 (in Chinese) . |
|
[2]
|
WANG Y R,LI Y,HE Sh T,et al.Femtosecond laser directly writing two dimensional metal sub-wavelength hole array applicable to terahertz band[J].Laser Optoelectronics Progress,2011(5):051402(in Chinese). |
|
[3]
|
XU B, WU X Y, LING Sh Q, et al. Numerical simulation of thermal electron emission in metal films ablated by multi-pulse femtosecond laser[J].Laser Optoelectronics Progress,2012(8):083201(in Chinese). |
|
[4]
|
JEON S, MALYARCHUK V, ROGERS J A, et al. Fabricating three-dimensional nanostructures using two photon lithography in a single exposure step[J]. Optics Express, 2006, 14(6): 2300-2308. |
|
[5]
|
YU H.Study on measurement of femtosecond laser pulse width[J]. Laser Technology, 2013, 37(5): 679-681(in Chinese). |
|
[6]
|
BAI L, ZHAO X L, LIU Y, et al. Optical fiber micro-hole sensor fabricated with femtosecond laser[J]. Laser Technology, 2013, 37(1): 101-104(in Chinese). |
|
[7]
|
NI X, SUN Q, CHEN Y, et al. Nano-ripples structure on material surface during femtosecond laser ablation[J].Nanotechnology and Precision Engineering, 2009, 7(1): 47-50(in Chinese). |
|
[8]
|
YANG Ch H, LIANG X H, TANG D Ch, et al. Evolution of silicon surface microstructure induced by Nd:YAG nanosecond laser[J]. Acta Physica Sinica, 2010 (10): 7015-7019(in Chinese). |
|
[9]
|
BONSE J, BAUDACH S, KRVGER J, et al. Femtosecond laser ablation of silicon-modification thresholds and morphology[J]. Applied Physics, 2002,A74(1):19-25. |
|
[10]
|
MIAO E M.Analysis of thermal influence of Si processed with femtosecond laser[J].China Mechanical Engineering , 2009, 15(12):1869-1872 (in Chinese). |
|
[11]
|
BONCH-BRUEVICH A M, LIBENSON M N, MAKIN V S, et al. Surface electromagnetic waves in optics[J]. Optical Engineering, 1992, 31(4): 718-730. |
|
[12]
|
BOROWIEC A, HAUGEN H K. Subwavelength ripple formation on the surfaces of compound semiconductors irradiated with femtosecond laser pulses[J]. Applied Physics Letters, 2003, 82(25): 4462-4464. |
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