Characteristics of Nd:Y3Al5O12 thin film prepared by electron beam evaporation deposition

REN Hao; ZENG Qun; PANG Zhen-hua; ZHOU Ying-heng; LIANG Xi-hui

doi:10.3969/j.issn.1001-806.2012.04.005

Volume 36 Issue 4

Apr. 2013

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Characteristics of Nd:Y3Al5O12 thin film prepared by electron beam evaporation deposition

1.
School for Information and Optoelectronic Science and Engineering, South China Normal University, Guangzhou 510631, China;
2.
Guangzhou Research Institute of Optics-Mechanics-Electricity Technology, Guangzhou 510663, China

Received Date: 2011-10-24
Accepted Date: 2011-12-16

Abstract

Si-based optoelectronic integration technology is one of the main study topics and development directions for the high-speed information.New Si-based luminescent materials were developed to break the limits of Nd:YAG solid laser material,which was confined by two main solid states:single crystal and transparent ceramics.Nd:YAG thin film was prepared on Si(100) substrates by electron beam evaporation deposition.The surface morphology,crystalline phase and optical properties of Nd:YAG thin film were characterized by X-ray diffraction,scanning electron microscopy and spectrophotometer.The crystallization of Nd:YAG thin film was improved after annealing at 1100℃ for 1h in the vacuum,photoluminescent spectra of Nd:YAG thin film were measured at room temperature,with 808nm radiation from a Ti:sapphire laser,and photoluminescent spectrum in the region of 1064nm peak was detected by a liquid nitrogen cooled InGaAs detector array.The results showed that Nd:YAG crystalline thin film was grown on Si substrates for the first time by means of electron beam evaporation deposition and subsequent high temperature annealing process.
- thin films,
- Nd:YAG,
- electron beam evaporation,
- photoluminescence

References

[1]	LI X,LIU H,WANG J Y,et al.Progress in transparent polycrystalline aluminum-yttrium garnet laser ceramic[J].Journal of Chinese Ceramic Society,2004,32(4):485-489(in Chinese).
[2]	SHI J L,FENG T.Inorganic optical transparent materials-transparent ceramics[M].Shanghai:Shanghai Popular Science Press,2008:60-72 (in Chinese).
[3]	EAKINS D K,HELD M,NORTON M G,et al.A study of fracture and defects in single crystal YAG[J].Journal of Crystal Growth,2004,267 (3/4):502-509.
[4]	MAO Y L,Q1U H W,XU J,et al.Spectra and laser characteristics of high-doped Nd:YAG laser crystals[J].Acta Optica Sinica,2001,21 (10):1264-1267 (in Chinese).
[5]	YANG R,TAO Z L,QIN J.Phase composition and luminescence properties of neodymium-doped yttrium aluminum gsrnet (Nd:YAG)ceramic powders[J].Journal of Beijing University of Chemical.Technology,2009,36(4):54-59(in Chinese).
[6]	SUAREZ M,FERNANDEZ J,MENENDEZ J L,et al.Hot isostatic pressing of optically active Nd:YAG powders doped by a colloidal processing route[J].Journal of the European Ceramic Society,2010,30(6):1489-1494.
[7]	MA H X,LOU Q H,QI Y F,et al.Spectrum characteristics of the polycrystalline transparent ceramic[J].Laser Technology,2004,28(5):488-490(in Chinese).
[8]	LUPEI V,LUPEI A,LKESUE A.Single crystal and transparent ceramic Nd-doped oxide laser materials:a comparative spectroscopic investigation[J].Journal of Alloys and Compounds,2004,380(1/2):61-70.
[9]	FELDMAN R,GOLAN Y,BURSHTEIN Z,et al.Strengthening of poly-crystalline (ceramic) Nd:YAG elements for high-power laser applications[J].Optical Materials,2011,33(5):695-701.
[10]	FIELD S J,HANNA D C,LARGE A C,et al.Low thteslold ionimplanted Nd:YAG channel waveguide laser[J].Electronics Letters,1991,27 (25):2375-2376.
[11]	HANNA D C,LARGE A C,SHEPHERD D P,et al.Low threshold quasi-three-level 946nm laser operation of an epitaxially grown Nd:Y3Al5012 waveguide[J].Applied Physics Letters,1993,63(1):7-9.
[12]	FERRAND B,PELENC D,CHARTIER I.Growth by LPE of Nd:YAG single crystal layers for waveguide laser applications[J].Journal of Crystal Growth,1993,128 (1/4):966-969.
[13]	SUN Z H,YUAN D R,DUAN X L,et al.Preparation of YAG mateiials by sol-gel method[J].Journal of Chinese Ceramic Society,2004,32(4):59-62(in Chinese).
[14]	WU Y C,PAROLA S,MARTY O,et al.Strucural characterizations and waveguiding properties of YAG thin films obtained by different solgel processes[J].Optical Materials,2005,27(9):1471-1479.
[15]	EZAKI M,OBAPA M,KUMAGM H,et al.Characterization of Nd:Y3Al5O12 thin films gown on various substrates by pulsed laser deposition[J].Applied Physics Letters,1996,69(20):2977-2979.
[16]	REMSA J,JELINEK M,KOCOUREK T,et al.Highly oriented crystalline Er:YAG and Er:YAP layers prepared by PLD and annealing[J].Applied Surface Science,2009,2.55(10):5292-5294.
[17]	REN H,PANG Z H,ZEN Q.Preparation of Nd:YAG ceramics materials by vacuum electron beam sintering method[J].Mechanical & Electrical Engineering Technology,2011,40(11):46-48 (in Chinese).
[18]	LI J,WU Y,PAN Y,et al.Solid-state-reaction fabrication and properties of high-doping Nd:YAG transparent laser ceramic[J].Journal of Chinese Ceramic Society,2007,35 (12):1600-1604(in Chinese).
[19]	LI X X,LI J T,HU Z G,Preparation of poly crystalline Nd:YAG nanopowders used for sintering transparent laser ceramics via lowtemperature combustion method[J].Journal of the Chinese Rare Earth Society,2007,25(4):483-486 (in Chinese).
[20]	LIU S H,LI C F.Photonics technology and application[M].Guangzhou:Guangdong Science and Technology Press,2006:121-124(in Chinese).

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通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

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Characteristics of Nd:Y3Al5O12 thin film prepared by electron beam evaporation deposition

1. School for Information and Optoelectronic Science and Engineering, South China Normal University, Guangzhou 510631, China;

2. Guangzhou Research Institute of Optics-Mechanics-Electricity Technology, Guangzhou 510663, China

Received Date: 2011-10-24

Accepted Date: 2011-12-16

Available Online: 2012-07-25

Abstract: Si-based optoelectronic integration technology is one of the main study topics and development directions for the high-speed information.New Si-based luminescent materials were developed to break the limits of Nd:YAG solid laser material,which was confined by two main solid states:single crystal and transparent ceramics.Nd:YAG thin film was prepared on Si(100) substrates by electron beam evaporation deposition.The surface morphology,crystalline phase and optical properties of Nd:YAG thin film were characterized by X-ray diffraction,scanning electron microscopy and spectrophotometer.The crystallization of Nd:YAG thin film was improved after annealing at 1100℃ for 1h in the vacuum,photoluminescent spectra of Nd:YAG thin film were measured at room temperature,with 808nm radiation from a Ti:sapphire laser,and photoluminescent spectrum in the region of 1064nm peak was detected by a liquid nitrogen cooled InGaAs detector array.The results showed that Nd:YAG crystalline thin film was grown on Si substrates for the first time by means of electron beam evaporation deposition and subsequent high temperature annealing process.

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Reference (20)

[1]	LI X,LIU H,WANG J Y,et al.Progress in transparent polycrystalline aluminum-yttrium garnet laser ceramic[J].Journal of Chinese Ceramic Society,2004,32(4):485-489(in Chinese).
[2]	SHI J L,FENG T.Inorganic optical transparent materials-transparent ceramics[M].Shanghai:Shanghai Popular Science Press,2008:60-72 (in Chinese).
[3]	EAKINS D K,HELD M,NORTON M G,et al.A study of fracture and defects in single crystal YAG[J].Journal of Crystal Growth,2004,267 (3/4):502-509.
[4]	MAO Y L,Q1U H W,XU J,et al.Spectra and laser characteristics of high-doped Nd:YAG laser crystals[J].Acta Optica Sinica,2001,21 (10):1264-1267 (in Chinese).
[5]	YANG R,TAO Z L,QIN J.Phase composition and luminescence properties of neodymium-doped yttrium aluminum gsrnet (Nd:YAG)ceramic powders[J].Journal of Beijing University of Chemical.Technology,2009,36(4):54-59(in Chinese).
[6]	SUAREZ M,FERNANDEZ J,MENENDEZ J L,et al.Hot isostatic pressing of optically active Nd:YAG powders doped by a colloidal processing route[J].Journal of the European Ceramic Society,2010,30(6):1489-1494.
[7]	MA H X,LOU Q H,QI Y F,et al.Spectrum characteristics of the polycrystalline transparent ceramic[J].Laser Technology,2004,28(5):488-490(in Chinese).
[8]	LUPEI V,LUPEI A,LKESUE A.Single crystal and transparent ceramic Nd-doped oxide laser materials:a comparative spectroscopic investigation[J].Journal of Alloys and Compounds,2004,380(1/2):61-70.
[9]	FELDMAN R,GOLAN Y,BURSHTEIN Z,et al.Strengthening of poly-crystalline (ceramic) Nd:YAG elements for high-power laser applications[J].Optical Materials,2011,33(5):695-701.
[10]	FIELD S J,HANNA D C,LARGE A C,et al.Low thteslold ionimplanted Nd:YAG channel waveguide laser[J].Electronics Letters,1991,27 (25):2375-2376.
[11]	HANNA D C,LARGE A C,SHEPHERD D P,et al.Low threshold quasi-three-level 946nm laser operation of an epitaxially grown Nd:Y3Al5012 waveguide[J].Applied Physics Letters,1993,63(1):7-9.
[12]	FERRAND B,PELENC D,CHARTIER I.Growth by LPE of Nd:YAG single crystal layers for waveguide laser applications[J].Journal of Crystal Growth,1993,128 (1/4):966-969.
[13]	SUN Z H,YUAN D R,DUAN X L,et al.Preparation of YAG mateiials by sol-gel method[J].Journal of Chinese Ceramic Society,2004,32(4):59-62(in Chinese).
[14]	WU Y C,PAROLA S,MARTY O,et al.Strucural characterizations and waveguiding properties of YAG thin films obtained by different solgel processes[J].Optical Materials,2005,27(9):1471-1479.
[15]	EZAKI M,OBAPA M,KUMAGM H,et al.Characterization of Nd:Y3Al5O12 thin films gown on various substrates by pulsed laser deposition[J].Applied Physics Letters,1996,69(20):2977-2979.
[16]	REMSA J,JELINEK M,KOCOUREK T,et al.Highly oriented crystalline Er:YAG and Er:YAP layers prepared by PLD and annealing[J].Applied Surface Science,2009,2.55(10):5292-5294.
[17]	REN H,PANG Z H,ZEN Q.Preparation of Nd:YAG ceramics materials by vacuum electron beam sintering method[J].Mechanical & Electrical Engineering Technology,2011,40(11):46-48 (in Chinese).
[18]	LI J,WU Y,PAN Y,et al.Solid-state-reaction fabrication and properties of high-doping Nd:YAG transparent laser ceramic[J].Journal of Chinese Ceramic Society,2007,35 (12):1600-1604(in Chinese).
[19]	LI X X,LI J T,HU Z G,Preparation of poly crystalline Nd:YAG nanopowders used for sintering transparent laser ceramics via lowtemperature combustion method[J].Journal of the Chinese Rare Earth Society,2007,25(4):483-486 (in Chinese).
[20]	LIU S H,LI C F.Photonics technology and application[M].Guangzhou:Guangdong Science and Technology Press,2006:121-124(in Chinese).

Characteristics of Nd:Y3Al5O12 thin film prepared by electron beam evaporation deposition

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通讯作者: 陈斌, bchen63@163.com

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Characteristics of Nd:Y3Al5O12 thin film prepared by electron beam evaporation deposition

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