Development of femtosecond laser direct writing waveguides in transparent optical materials

LI Shi-ling; YE Yong-kai

doi:10.3969/j.issn.1001-3806.2012.06.018

Volume 36 Issue 6

Sep. 2012

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Development of femtosecond laser direct writing waveguides in transparent optical materials

LI Shi-ling¹,
YE Yong-kai²

1.
Shandong Provincial Key Laboratory of Laser and Information Technology, College of Physics and Engineering, Qufu Normal University, Qufu 273165, China;
2.
College of computer Science, Qufu Normal University, Qufu 273165, China

Received Date: 2012-01-03
Accepted Date: 2012-02-29

Abstract

The fabrication process,investigation of femtosecond laser direct writing optical waveguides,different transparent materials for direct writing optical waveguides,and the applications of direct writing optical waveguides were reviewed.As is summarized,the induced refractive index changes are materials related,and also dependent on laser energy,pulse duration repetition rate,polarization,and the scan velocity,etc.The femtosecond laser micromachining technique has extensive application prospects in the field of photonic devices.
- integrated optics,
- optical waveguide,
- femtosecond laser,
- nonlinear crystal,
- laser crystal,
- waveguide laser,
- waveguide amplifier

References

[1]	CHEN F,WANG X L,WANG K M.Development of ion-implanted optical waveguides in optical materials:a review[J].Optical Materials,2007,29(11):1523-1542.
[2]	QIAO W C.Study of the Cerenkov type second harmonic generation in ion-implanted lithium niobate planar waveguides[D].Ji'nan:Shandong University,2008:1-48(in Chinese).
[3]	DAVIS K M,MIURA K,SUGIMOTO N,et al.Writing waveguides in glass with a fs-laser[J].Optics Letters,1996,21(21):1729-1731.
[4]	CHEN H Y.Interaction between femtosecond laser and ferroelectric crystals,and the properties of waveguiding coupling[D].Shanghai: Shanghai Jiaotong University,2007:1-108(in Chinese).
[5]	SUN X Y,HU Y W,DUAN J A.The research progress of femtosecond laser written photonic devices[J].Journal of Functional Materials,2009,40(s1):752-755(in Chinese).
[6]	ZHANG F,XIAO Z S,YAN L,et al.Progress in strudy on fabrication of optical waveguide[J].Optical Technique,2009,35(s1): 114-120(in Chinese).
[7]	ZHANG S G.Second harmonic generation of periodically poled microstucture using ultra-short laser pulses[D].Tianjin:Nankai Uiniversity,2009:1-140(in Chinese).
[8]	ZHANG H,EATON S M,HERMAN P R.Low-loss tyepeⅡ waveguide writing in fused silica with single picosecond laser pulses[J].Optics Express,2006,14(11):4826-4834.
[9]	ZHANG Y S.Interaction between femtosecond laser and ferroelectric crystals,and the properties of waveguide[D].Shanghai:Shanghai Jiaotong University,2008:1-95(in Chinese).
[10]	HE F,CHENG Y.Femtosecond laser micromachining:frontier in laser precision micromachining[J].Chinese Journal of Lasers,2007, 34(5):595-622(in Chinese).
[11]	ZHANG Y.The technique of femtosecond pulse laser lithography waveguide[D].Xi'an:Xi'an Institute of Optics&Precision Mechanics,2009:1-78(in Chinese).
[12]	LIU X,QU S,TAN Y,et al.Buried channel waveguides in neodymium-doped KGd(WO4)2 fabricated by low-repetition-rate femtosecond laser writing[J].Applied Physics,2011,B103(1):145-149.
[13]	GONG X J,CHU J R,YANG J J,et al.An improved way for fabricating micro-waveguide by femtosecond laser[J].Optics and Precision Engineering,2007,15(1):27-32(in Chinese).
[14]	GONG X J.Research on some key problems in femtosecond laser fabricating micro-optics deviees[D].Hefei:University of Science and Techonology of China,2009:1-94(in Chinese).
[15]	AMS M,MARSHALL G D,SPENCE D J,et al.Slit beam shaping method for femtosecond laser direct-write fabrication of symmetric waveguides in bulk glasses[J].Optics Express,2005,13(15): 5676-5681.
[16]	OSELLAME R,TACCHEO S,MARíANGONI M,et al.Femtosecond writing of active optical waveguides with astigmatically shaped beams[J].Journal of the Optical Society of America,2003,B20 (7):1559-1567.
[17]	PSAILA N D,THOMSON R R,BOOKEY H T,et al.Femtosecond laser inscription of optical waveguides in bismuth ion doped glass[J].Optics Express,2006,14(22):10452-10459.
[18]	TAN Y.Lasers and nonlinear effects in waveguides of optical crystals[D].Ji'nan:Shandong University,2011:1-143(in Chinese).
[19]	MANSOUR I,CACCAVALE F.An improved procedure to calculate the refractive Index profile from the measured near-field intensity[J].Journal of Lightwave Technology,1996,14(3):423-428.
[20]	CHEN F,WANG L,JIANG Y,et al.Optical channel waveguides in Nd:YVO4 crystal produced by O+ ion implantation[J].Applied Physics Letters,2006,88(7):071123/1-071123/3.
[21]	LI S L,HAN P G,SHI M.Channel waveguide fabrication in z-cut LiNbO3 by femtosecond laser pulses[J].Journal of Optoelectronics· Laser,2011,22(6):897-900(in Chinese).
[22]	THOMSON R R,CAMPBELL S,BLEWETT I J,et al.Optical waveguide fabrication in z-cut lithium niobate(LiNbO3)using femtosecond pulses in the low repetition rate regime[J].Applied Physics Letters,2006,88(11):111109/1-111109/3.
[23]	GUI L,XU B X,CHONG T C.Microstructure in lithium niobate by use of focused femtosecond laser pulses[J].IEEE Photonics Technology Letters,2004,16(5):1337-1339.
[24]	LEE Y L,YU N E,JUNG C,et al.Second-harmonic generation in periodically poled lithium niobate waveguides fabricated by femtosecond laser pulses[J].Applied Physics Letters,2006,89(17): 171103/1-171103/3.
[25]	NEJADMALAYERI H,HERMAN P R.Ultrafast laser waveguide writing:lithium niobate and the role of circular polarization and picosecond pulse width[J].Optics Letters,2006,31(20):2987-2989.
[26]	BURGHOFF J,NOLTE S,TUNNERMANN A.Origins of waveguiding in femtosecond laser-structured LiNbO3[J].Applied Physics, 2007,A89(1):127-132.
[27]	HUANG Z C,TU C H,ZHANG S G,et al.Femtosecond secondharmonic generation in periodically poled lithium niobate waveguides written by femtosecond laser pulses[J].Optics Letters,2010,35 (6):877-879.
[28]	KUMATORIYA M,NAKABAYSHI M,SAKAKURA M,et al.Optical properties of a waveguide written inside a LiTaO3 crystal by irradiation with focused femtosecond laser pulses[J].Optical Review, 2011,18(1):166-170.
[29]	SILVA W F,JACINTO C,BENAYAS A,et al.Femtosecond-laserwritten,stress-induced Nd:YVO4 waveguides preserving fluorescence and Raman gain[J].Optics Letters,2010,35(7):916-918.
[30]	TAN Y,CHEN F,ALDANA J R V,et al.Continuous wave laser generation at 1064nm in femtosecond laser inscribed Nd:YVO4 channel waveguides[J].Applied Physics Letters,2010,97(3): 031119/1-031119/3.
[31]	TAN Y,JIA Y,CHEN F,et al.Simultaneous dual-wavelength lasers at 1064 and 1342nm in femtosecond-laser-written Nd:YVO4 channel waveguides[J].Journal of the Optical Society of America, 2011,B28(7):1607-1610.
[32]	OKHRIMCHUK A G,SHESTAKOV A V,KHRUSHCHEV I,et al. Depressed cladding,buried waveguide laser formed in a YAG:Nd3+ crystal by femtosecond laser writing[J].Optics Letters,2005,30 (17):2248-2250.
[33]	RóDENAS A,TORCHIA G A,LIFANTE G,et al.Refractive index change mechanisms in femtosecond laser written ceramic Nd:YAG waveguides:micro-spectroscopy experiments and beam propagation calculations[J].Applied Physics,2009,B95(1):85-96.
[34]	TAN Y,RODENAS A,CHEN F,et al.70%slope efficiency from an ultrafast laser-written Nd:GdVO4 channel waveguide laser[J]. Optics Express,2010,18(24):24994-24999.
[35]	DONG N,MENDIVIL J M,CANTELAR E,et al.Self-frequencydoubling of ultrafast laser inscribed neodymium doped yttrium aluminum borate waveguides[J].Applied Physics Letters,2011,98 (18):181103/1-181103/3.
[36]	ZHANG C,DONG N,YANG J,et al.Channel waveguide lasers in Nd:GGG crystals fabricated by femtosecond laser inscription[J]. Optics Express,2011,19(13):12503-12508.
[37]	JAQUE D,PSAILA N D,THOMSON R R,et al.Ultrafast laser inscription of bistable and reversible waveguides in strontium barium niobate crystals[J].Applied Physics Letters,2010,96(19): 191104/1-191104/3.
[38]	DAVIS K M,MIURA K,SUGIMOTO N,et al.Writing waveguides in glass with a femtosecond laser[J].Optics Letters,1996,21 (21):1729-1731.
[39]	HOMOELLE D,WIELANDY S,GAETA A,et al.Infrared photosensitivity in silica glasses exposed to femtosecond laser pulses[J]. Optics Letters,1999,24(18):1311-1313.
[40]	SCHAFFER C,BRODEUR A,GARCIA J,et al.Micromachining bulk glass by use of femtosecond laser pulses with nanojoule energy[J].Optics Letters,2001,26(2):93-95.
[41]	MIURA K,QIU J,INOUYE H,et al.Photowritten optical waveguides in various glasses with ultrashort pulse laser[J].Applied Physics Letters,1997,71(23):3329-3331.
[42]	HOMOELLE D,WIELANDY S,GAETA A,et al.Infrared photosensitivity in silica glasses exposed to femtosecond laser pulses[J]. Optics Letters,1999,24(18):1311-1313.
[43]	STRELTSOV A,BORRELLI F.Study of femtosecond-laser-written waveguides in glasses[J].Journal of the Optical Society of America, 2002,B19(10):2496-2504.
[44]	ZHOU Q,LIU L,XU L,et al.Femtosecond laser induced darkening and refractive index change in K9 glass[J].Chinese Journal of Lasers,2005,32(1):119-122(in Chinese).
[45]	MARSHALL G D,DEKKER P,AMS M,et al.Directly written monolithic waveguide laser incorporating a distributed feedback waveguide-Bragg grating[J].Optics Letters,2008,33(9):956-958.
[46]	RAMSAY E,THOMSON R R,PSAILA N D,et al.Laser action from an ultrafast laser inscribed Nd-doped silicate glass waveguide[J].Photonics Technology Letters,2010,22(11):742-744.

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通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

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Development of femtosecond laser direct writing waveguides in transparent optical materials

1. Shandong Provincial Key Laboratory of Laser and Information Technology, College of Physics and Engineering, Qufu Normal University, Qufu 273165, China;

2. College of computer Science, Qufu Normal University, Qufu 273165, China

Received Date: 2012-01-03

Accepted Date: 2012-02-29

Available Online: 2012-11-25

Abstract: The fabrication process,investigation of femtosecond laser direct writing optical waveguides,different transparent materials for direct writing optical waveguides,and the applications of direct writing optical waveguides were reviewed.As is summarized,the induced refractive index changes are materials related,and also dependent on laser energy,pulse duration repetition rate,polarization,and the scan velocity,etc.The femtosecond laser micromachining technique has extensive application prospects in the field of photonic devices.

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Reference (46)

[1]	CHEN F,WANG X L,WANG K M.Development of ion-implanted optical waveguides in optical materials:a review[J].Optical Materials,2007,29(11):1523-1542.
[2]	QIAO W C.Study of the Cerenkov type second harmonic generation in ion-implanted lithium niobate planar waveguides[D].Ji'nan:Shandong University,2008:1-48(in Chinese).
[3]	DAVIS K M,MIURA K,SUGIMOTO N,et al.Writing waveguides in glass with a fs-laser[J].Optics Letters,1996,21(21):1729-1731.
[4]	CHEN H Y.Interaction between femtosecond laser and ferroelectric crystals,and the properties of waveguiding coupling[D].Shanghai: Shanghai Jiaotong University,2007:1-108(in Chinese).
[5]	SUN X Y,HU Y W,DUAN J A.The research progress of femtosecond laser written photonic devices[J].Journal of Functional Materials,2009,40(s1):752-755(in Chinese).
[6]	ZHANG F,XIAO Z S,YAN L,et al.Progress in strudy on fabrication of optical waveguide[J].Optical Technique,2009,35(s1): 114-120(in Chinese).
[7]	ZHANG S G.Second harmonic generation of periodically poled microstucture using ultra-short laser pulses[D].Tianjin:Nankai Uiniversity,2009:1-140(in Chinese).
[8]	ZHANG H,EATON S M,HERMAN P R.Low-loss tyepeⅡ waveguide writing in fused silica with single picosecond laser pulses[J].Optics Express,2006,14(11):4826-4834.
[9]	ZHANG Y S.Interaction between femtosecond laser and ferroelectric crystals,and the properties of waveguide[D].Shanghai:Shanghai Jiaotong University,2008:1-95(in Chinese).
[10]	HE F,CHENG Y.Femtosecond laser micromachining:frontier in laser precision micromachining[J].Chinese Journal of Lasers,2007, 34(5):595-622(in Chinese).
[11]	ZHANG Y.The technique of femtosecond pulse laser lithography waveguide[D].Xi'an:Xi'an Institute of Optics&Precision Mechanics,2009:1-78(in Chinese).
[12]	LIU X,QU S,TAN Y,et al.Buried channel waveguides in neodymium-doped KGd(WO4)2 fabricated by low-repetition-rate femtosecond laser writing[J].Applied Physics,2011,B103(1):145-149.
[13]	GONG X J,CHU J R,YANG J J,et al.An improved way for fabricating micro-waveguide by femtosecond laser[J].Optics and Precision Engineering,2007,15(1):27-32(in Chinese).
[14]	GONG X J.Research on some key problems in femtosecond laser fabricating micro-optics deviees[D].Hefei:University of Science and Techonology of China,2009:1-94(in Chinese).
[15]	AMS M,MARSHALL G D,SPENCE D J,et al.Slit beam shaping method for femtosecond laser direct-write fabrication of symmetric waveguides in bulk glasses[J].Optics Express,2005,13(15): 5676-5681.
[16]	OSELLAME R,TACCHEO S,MARíANGONI M,et al.Femtosecond writing of active optical waveguides with astigmatically shaped beams[J].Journal of the Optical Society of America,2003,B20 (7):1559-1567.
[17]	PSAILA N D,THOMSON R R,BOOKEY H T,et al.Femtosecond laser inscription of optical waveguides in bismuth ion doped glass[J].Optics Express,2006,14(22):10452-10459.
[18]	TAN Y.Lasers and nonlinear effects in waveguides of optical crystals[D].Ji'nan:Shandong University,2011:1-143(in Chinese).
[19]	MANSOUR I,CACCAVALE F.An improved procedure to calculate the refractive Index profile from the measured near-field intensity[J].Journal of Lightwave Technology,1996,14(3):423-428.
[20]	CHEN F,WANG L,JIANG Y,et al.Optical channel waveguides in Nd:YVO4 crystal produced by O+ ion implantation[J].Applied Physics Letters,2006,88(7):071123/1-071123/3.
[21]	LI S L,HAN P G,SHI M.Channel waveguide fabrication in z-cut LiNbO3 by femtosecond laser pulses[J].Journal of Optoelectronics· Laser,2011,22(6):897-900(in Chinese).
[22]	THOMSON R R,CAMPBELL S,BLEWETT I J,et al.Optical waveguide fabrication in z-cut lithium niobate(LiNbO3)using femtosecond pulses in the low repetition rate regime[J].Applied Physics Letters,2006,88(11):111109/1-111109/3.
[23]	GUI L,XU B X,CHONG T C.Microstructure in lithium niobate by use of focused femtosecond laser pulses[J].IEEE Photonics Technology Letters,2004,16(5):1337-1339.
[24]	LEE Y L,YU N E,JUNG C,et al.Second-harmonic generation in periodically poled lithium niobate waveguides fabricated by femtosecond laser pulses[J].Applied Physics Letters,2006,89(17): 171103/1-171103/3.
[25]	NEJADMALAYERI H,HERMAN P R.Ultrafast laser waveguide writing:lithium niobate and the role of circular polarization and picosecond pulse width[J].Optics Letters,2006,31(20):2987-2989.
[26]	BURGHOFF J,NOLTE S,TUNNERMANN A.Origins of waveguiding in femtosecond laser-structured LiNbO3[J].Applied Physics, 2007,A89(1):127-132.
[27]	HUANG Z C,TU C H,ZHANG S G,et al.Femtosecond secondharmonic generation in periodically poled lithium niobate waveguides written by femtosecond laser pulses[J].Optics Letters,2010,35 (6):877-879.
[28]	KUMATORIYA M,NAKABAYSHI M,SAKAKURA M,et al.Optical properties of a waveguide written inside a LiTaO3 crystal by irradiation with focused femtosecond laser pulses[J].Optical Review, 2011,18(1):166-170.
[29]	SILVA W F,JACINTO C,BENAYAS A,et al.Femtosecond-laserwritten,stress-induced Nd:YVO4 waveguides preserving fluorescence and Raman gain[J].Optics Letters,2010,35(7):916-918.
[30]	TAN Y,CHEN F,ALDANA J R V,et al.Continuous wave laser generation at 1064nm in femtosecond laser inscribed Nd:YVO4 channel waveguides[J].Applied Physics Letters,2010,97(3): 031119/1-031119/3.
[31]	TAN Y,JIA Y,CHEN F,et al.Simultaneous dual-wavelength lasers at 1064 and 1342nm in femtosecond-laser-written Nd:YVO4 channel waveguides[J].Journal of the Optical Society of America, 2011,B28(7):1607-1610.
[32]	OKHRIMCHUK A G,SHESTAKOV A V,KHRUSHCHEV I,et al. Depressed cladding,buried waveguide laser formed in a YAG:Nd3+ crystal by femtosecond laser writing[J].Optics Letters,2005,30 (17):2248-2250.
[33]	RóDENAS A,TORCHIA G A,LIFANTE G,et al.Refractive index change mechanisms in femtosecond laser written ceramic Nd:YAG waveguides:micro-spectroscopy experiments and beam propagation calculations[J].Applied Physics,2009,B95(1):85-96.
[34]	TAN Y,RODENAS A,CHEN F,et al.70%slope efficiency from an ultrafast laser-written Nd:GdVO4 channel waveguide laser[J]. Optics Express,2010,18(24):24994-24999.
[35]	DONG N,MENDIVIL J M,CANTELAR E,et al.Self-frequencydoubling of ultrafast laser inscribed neodymium doped yttrium aluminum borate waveguides[J].Applied Physics Letters,2011,98 (18):181103/1-181103/3.
[36]	ZHANG C,DONG N,YANG J,et al.Channel waveguide lasers in Nd:GGG crystals fabricated by femtosecond laser inscription[J]. Optics Express,2011,19(13):12503-12508.
[37]	JAQUE D,PSAILA N D,THOMSON R R,et al.Ultrafast laser inscription of bistable and reversible waveguides in strontium barium niobate crystals[J].Applied Physics Letters,2010,96(19): 191104/1-191104/3.
[38]	DAVIS K M,MIURA K,SUGIMOTO N,et al.Writing waveguides in glass with a femtosecond laser[J].Optics Letters,1996,21 (21):1729-1731.
[39]	HOMOELLE D,WIELANDY S,GAETA A,et al.Infrared photosensitivity in silica glasses exposed to femtosecond laser pulses[J]. Optics Letters,1999,24(18):1311-1313.
[40]	SCHAFFER C,BRODEUR A,GARCIA J,et al.Micromachining bulk glass by use of femtosecond laser pulses with nanojoule energy[J].Optics Letters,2001,26(2):93-95.
[41]	MIURA K,QIU J,INOUYE H,et al.Photowritten optical waveguides in various glasses with ultrashort pulse laser[J].Applied Physics Letters,1997,71(23):3329-3331.
[42]	HOMOELLE D,WIELANDY S,GAETA A,et al.Infrared photosensitivity in silica glasses exposed to femtosecond laser pulses[J]. Optics Letters,1999,24(18):1311-1313.
[43]	STRELTSOV A,BORRELLI F.Study of femtosecond-laser-written waveguides in glasses[J].Journal of the Optical Society of America, 2002,B19(10):2496-2504.
[44]	ZHOU Q,LIU L,XU L,et al.Femtosecond laser induced darkening and refractive index change in K9 glass[J].Chinese Journal of Lasers,2005,32(1):119-122(in Chinese).
[45]	MARSHALL G D,DEKKER P,AMS M,et al.Directly written monolithic waveguide laser incorporating a distributed feedback waveguide-Bragg grating[J].Optics Letters,2008,33(9):956-958.
[46]	RAMSAY E,THOMSON R R,PSAILA N D,et al.Laser action from an ultrafast laser inscribed Nd-doped silicate glass waveguide[J].Photonics Technology Letters,2010,22(11):742-744.

Development of femtosecond laser direct writing waveguides in transparent optical materials

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通讯作者: 陈斌, bchen63@163.com

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Development of femtosecond laser direct writing waveguides in transparent optical materials

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