Defect detection and control of a laser conditioning system for large diameter optical film
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School of Photoelectric Information, University of Electronic Science and Technology of China, Chengdu 610054, China
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Corresponding author:
YE Yu-tang, ytye@uestc.edu.cn
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Received Date:
2011-07-15
Accepted Date:
2011-08-25
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Abstract
A laser conditioning system for large-aperture optical film is to determine the defect distribution of the large-diameter optical film and repair the defects with laser.In order to guarantee the speed and accuracy of detection system,the motion control and compensation of the defect detection part was improved.Theoretical analysis and experimental verification were conducted,and the reading accuracy of gratings,the servo control accuracy and the compensation value of image acquisition offset were obtained at different velocities.The results show that the detection accuracy of the laser conditioning system for large-diameter optical thin-film can be improved by means of multiple motion corrections and an appropriate motion compensation if controlling the motion of the servo motor and the map points based on point comparison function at high speed(20mm/s),thereby improving its laser pretreatment effect.
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References
|
[1]
|
NORTON M A,ADAMS J J,CARR C W,et al.Growth of laser damage in fused silica:diameter to depth ratio[J].Proceedings of SPIE,2007,6720:67200H/1-67200H/10. |
|
[2]
|
CHEN M,XIANG X,JIANG Y,et al.Enhancement of laser induced damage threshold of fused silica by acid etching combined with UV laser condition[J].High Power Laser and particle Beans,2010,22(6):1383-1387(in Chinese). |
|
[3]
|
HOU R X.Application and development of supersonic cleaning optical elements[J].Optical Technology,1996,22(3):44-47(in Chinese). |
|
[4]
|
CHEN S Zh.Ultrasonic cleaning technology and its development[J].Cleaning Technology,2004,2(2):7-12(in Chinese). |
|
[5]
|
CUI Y,ZHAO Y A,HE H B,et al.Effects of ultrasonics cleaning and laser conditioning on the laser induce damage threshold of the antireflection[J].High Power Laser and Particle Beams,2006,18(10):1712-1716(in Chinese). |
|
[6]
|
ZHANG D P,ZHANG D W,FAN Sh H,et al.Using ion post-treatment technique to improve laser-induced damage threshold of thin films[J].High Power Laser and Particle Beans,2005,17(2):213-216(in Chinese). |
|
[7]
|
HUANG Z X,JIANG X D,REN H,et al.Study of laser conditioning influence on properities of optical films[J].High Power Laser and Particle Beans,2004,16(1):23-26(in Chinese). |
|
[8]
|
CHEN M,YUAN X D,LÜH B,et al.Laser conditioning technology of optics[J].Optical Technique,2010,36(1):79-83(in Chinese). |
|
[9]
|
HUANG J,LÜH B,YE L,et al.Damage threshold improvement of fused silica chip by CO2 1aser pretreatment[J].Chinese Journal of Lasers,2007,34(5):723-727(in Chinese). |
|
[10]
|
HUANG J,ZHAO S N,WANG H J,et al.Local CO2 laser treatment for repair surface defect in fused silica[J].Chinese Journal of Lasers,2009,36(5):1282-1286(in Chinese). |
|
[11]
|
HUANG J,LÜH B,WANG H J,et al.Research of enhancing damage-thresholds of fused silica using UV laser treatment[J].Laser Technology,2009,33(3):297-313(in Chinese). |
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