Correction model mixed with least-square and grid method for dual galvanometric scanning

In order to decrease nonlinear distortion error in the state of wide-angle scanning of a two-dimension galvanometer scanning system,aiming at the defects of various errors in the system itself which cannot be overcame absolutely by single theoretical correction model,the correction model based on mapping connection between coordinates and angles was put forward.The error compensation surface of coordinate points was established by means of the least square surface fitting method,and the correction precision was effectively improved,the error of test points could be limited around 15μm.The scanning speed can be obviously increased by the grid correction table plugged by piecewise linear interpolation in the scanning plane,and the scanning speed can get to 25m/s or so.Simulation results show that the model is effective for real-time dynamic adjusting of nonlinear scanning.