Simulation and structure design of a high power laser mirror with self-compensation of thermal distortion

A high-power laser mirror with self-compensation for thermal distortion was presented and numerically simulated on the basis of its thermal deformation behavior after optimizing its substrate structure.When 7kW laser was input in 17cm diameter,and the reflectivity of the mirror was 98%,the difference between central maximum thermal distortion and boundary thermal distortion within laser radiation region on the mirror surface for the general silicon substrate(peak valley values) was 0.167μm,0.174μm and 0.172μm respectively,under the radiation time of 2s,4s and 10s.However,the thermal distortion difference(peak valley values) of the laser mirror with self-compensation of thermal distortions was 0.092μm,0.052μm,0.027μm,respectively.The study results are useful for improving the heat-effective stability and beam quality.