Design of soft X-ray multilayer for familiar spacing layer material

To study the material commonly used in the interval of soft X-ray multilayer, soft X-ray multilayer with high reflectivity were designed with the special design program prepared by the Lawrence-Livermore National Laboratory. The results show that Molybdenum has good optical property in a wide waveband. Besides at optimum wavelength of 12.44nm, molybdenum has high reflectivity at other wavelengths except 4.36nm. Multilayer consisting of uranium and other spacing layer material, with uranium as an absorption layer, also has higher reflectivity in a large wavelength range. The results are helpful for selection of multilayer material.