Theoretical study on wave aberration of mosaic compression gratings

To study effect of wave aberration on tiling results, far-field characteristic parameters for two-pair gratings with wave aberration were calculated by means of analogy calculation. On the basis of a certain evaluation criterion, the tiling accuracy of the mosaic gratings was obtained. Calculation results show that for the wave aberration with the coma of 0.5, the maximum piston-error of the tiling precision is about 0.42 grating period, and the maximum tip-tip error is 0.52rad approximately, which are lower than those of gratings without wave aberration. The result is useful for preparation of large aperture compression mosaic gratings.