Theoretical study on wave aberration of mosaic compression gratings
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1.
School of Physics and Electronic Engineering, Changshu Institute of Technology, Changshu 215500, China;
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2.
Institute of Information Optical Engineering, Soochow University, Suzhou 215006, China
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Corresponding author:
WU Jian-hong, jhwu@suda.edu.cn
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Received Date:
2010-07-05
Accepted Date:
2010-09-21
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Abstract
To study effect of wave aberration on tiling results, far-field characteristic parameters for two-pair gratings with wave aberration were calculated by means of analogy calculation. On the basis of a certain evaluation criterion, the tiling accuracy of the mosaic gratings was obtained. Calculation results show that for the wave aberration with the coma of 0.5, the maximum piston-error of the tiling precision is about 0.42 grating period, and the maximum tip-tip error is 0.52rad approximately, which are lower than those of gratings without wave aberration. The result is useful for preparation of large aperture compression mosaic gratings.
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