Clearance of SiO2 particles on K9 glass surfaces by means of laser shockwave

Particle contaminations on the optical surfaces limit the operation of optical systems.In order to solve the pollution problem,laser plasma shockwave was utilized to remove the SiO2 particles on the surface of K9 glass.The laser cleaning effect was studied in the scanning mode.In case of single pulse laser cleaning,the effect of several parameters,such as particle position,separation distance and laser energy,on the cleaning result was simulated and demonstrated in experiments.The results show that Nd:YAG laser can remove the SiO2 particles effectively if properly controlling the laser parameters.The simulation results are consistent with the experimental ones in case of single pulse laser cleaning.