Citation: | YE Ya-yun, YUAN Xiao-dong, XIANG Xia, WANG Hai-jun, YAN Uang-hong, CHEN Meng, HE Shao-bo, . Clearance of SiO2 particles on K9 glass surfaces by means of laser shockwave[J]. LASER TECHNOLOGY, 2011, 35(2): 245-248. DOI: 10.3969/j.issn.1001-3806.2011.02.028 |
[1] |
CHEN J F,ZHANG Y K,KONG D J,et al.Resoareh progress of cleaning tiny particles by short-pulsod laser[J].Laser Technology,2007,31 (3):301-305(in Chinese).
|
[2] |
ZAPKA W,ZIEMLICH W,TAM A C.Efficient pulsed laser removal of 0.2μm sized particle from a solid surface[J].Journal of Applied Physics,1991,58 (20):2217-2219.
|
[3] |
TAM A C,LEUNG W P,ZAPKA W,et al.Laser-cleaning techniques for removal of surface particulates[J].Journal of Applied Physics,1992,71 (7):3515-3523.
|
[4] |
PASQUET P,DEL C R,BONEBERG J,et al.Laser cleaning of oxide iron layer:efficiency enhancement due to electrochemical induced absorptivity change[J].Applied Physics,1999,A69 (7):727-730.
|
[5] |
GUO W X,HU Q W,WANG Z M,et al.Paint removal research on high power pulse TEA CO2 lasor[J].Optics Optoeleetronic Technology,2006,4(3):32-35(in Chinese).
|
[6] |
DOMENICO A,ALESSANDRO B,GIOVANNI B,et al.Selective laser cleaning of chlorine on ancient coins[J].Preceedings of SPIE,2007,6346:63463H.
|
[7] |
LEE J M,WATKINS K G.Removal of small particles on silicon wafer by laser-induced airborne plasma shock waves[J].Journal of Applied Physics,2001,89(11):6496-6500.
|
[8] |
ZHANG P,BIAN B M,LI Z H.Ejecting removal of particles in laser-induced plasma shockwave cleaning[J].Chinese Journal of Lasers,2007,34(10):1454-1455(in Chinese).
|
[9] |
LIM H,JANG D,KIN D,et al.Correlation between particle removal and shock-wave dynamics in the laser shock cleaning process[J].Journal of Applied Physics,2005,97 (5):054903/1-054903/6.
|
[10] |
LAMMERS N A,BLEEKER A.Laser shockwave cleaning of EUV reticles[J].Proceedings of SPIE,2007,6730:67304P.
|