A method to restore 3-D surface of large area and low resolution interferogram

WEN Cheng-hua; HUANG Lei; ZHANG Hai-tao; QIU Yun-tao; GONG Ma-li

doi:10.3969/j.issn.1001-3806.2011.02.020

For the purpose of dealing with low-resolution interferograms acquired by large-diameter interferometer,a method was presented including homogenization and ternary and so on.The acquired interferograms,which couldn't be processed by interferometers,were filtered and the 3-D surfaces were restored.Compared with the traditional Goldstein filter method,the results show that this method enhances the restoration possibility of low resolution interferogram,and paves the way for its latter process.

A method to restore 3-D surface of large area and low resolution interferogram

Corresponding author: GONG Ma-li, gongml@mail.tsinghua.edu.cn

1. Center for Photonics and Electronics, State Key Laboratory of Tribology, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China

Received Date: 2010-04-21

Accepted Date: 2010-06-01

Available Online: 2011-03-25

Abstract: For the purpose of dealing with low-resolution interferograms acquired by large-diameter interferometer,a method was presented including homogenization and ternary and so on.The acquired interferograms,which couldn't be processed by interferometers,were filtered and the 3-D surfaces were restored.Compared with the traditional Goldstein filter method,the results show that this method enhances the restoration possibility of low resolution interferogram,and paves the way for its latter process.

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Reference (9)

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A method to restore 3-D surface of large area and low resolution interferogram

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