Analysis and development of microscale laser shock peening oriented metalic components in MEMS

FAN Yu-jie; ZHOU Jian-zhong; HUANG Shu; WEI Deng-hui; WANG Min

doi:10.3969/j.issn.1001-3806.2010.O5.024

Volume 34 Issue 5

Oct. 2010

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Analysis and development of microscale laser shock peening oriented metalic components in MEMS

1.
School of Mechanical Engineering, Jiangsu University, Zhenjiang 212013, China

Corresponding author: ZHOU Jian-zhong, zhoujz@ujs.edu.cn ;
Received Date: 2009-09-07
Accepted Date: 2009-11-23

Abstract

Laser shock peening suitable for metal micro components was introduced. The desirable compressive stress distribution might be induced by the control of process parameters and reasonable path,so the wear and fatigue resistance can be improved. The research status,mechanism, key technology and influence factors of microscale laser shock peening were summarized and the problems in microscale laser shock peening were analyzed, which provides guidance for further research.
- laser technique,
- microscale laser shock peening,
- micro component,
- residual stress,
- fatigue performance

References

[1]	van SPENGEN W M,PUERS R,MERTENS R,et al.A low frequency electrical test set-up for the reliability assessment of capacitive RF MEMS switches[J].Journal of Micromechanics and Microengineering,2003,13(5):604-612.
[2]	BRAZZLE J D,TAYLOR W P,GANESH B,et al.Solution hardened platinum alloy flexurematerials for improved performance and reliability of MEMS devices[J].Journal of Micromechanics and Microengineering,2004,15(1):43-48.
[3]	MILLER S L,RODGERS M S,la VIGNE G,et al.Failure modes in surface micromachined microelectromechanical actuation systems[J].Microelectronics Reliability,1999,38(8):1229-1237.
[4]	HENCK S A.Lubrication of digital micromirror devices[J].Tribology Letters,1997,3(3):239-247.
[5]	PATTON S T,ZABINSKI J S.Failure mechanisms of a MEMS actuator in very high vacuum[J].Tribology International,2002,35(6):373-379.
[6]	SMALLWOOD S A,EAPEN K C,PATTON S T,et al.Performance results of MEMS coated with a conformal DLC[J].Wear,2006,260(11/12):1179-1189.
[7]	PEYRE P,FABBRO R,MERRIEN P,et al.Laser shock processing of aluminum alloys application to high cycle fatigue behavior[J].Materials Science and Engineering,1996,210(1/2):102-113.
[8]	FAIRAND B P,CLAUER A H.Use of laser generated shocks to improve the properties of metals and alloys[J].SPIE,1976,86:112-119.
[9]	REN N F,YANG J Ch,CAN L.Effects of laser shocking on the mechanical properties of metals[J].Laser Technology,1998,22(4):235-238(in Chinese).
[10]	PARKER A.Shocked and stressed,metals get stronger[J].Science Technology Review,2001(3):26-28.
[11]	WANG G L,ZHOU J Zh,ZHANG X Q,et al.Application of laser-induced shock wave in surface modification and forming of sheet metal[J].Transactions of the Chinese Society for Agricultural Machinery,2005,36(12):148-152(in Chinese).
[12]	FABBRO R,FOURNIER J,BALLARD P,et al.Physical study of laser-produced plasma in confined geometry[J].J A P,1990,68(2):775-782.
[13]	ZHANG W W,YAO Y L.Micro scale laser shock processing of metallic components[J].Journal of Manufacturing Science and Engineering,2002,124(2):369-378.
[14]	ZHANG W W,YAO Y L.Microscale laser shock processing-modeling testing,and microstructure characterization[J].Journal of Manufacturing Processes,2001,3(2):128-143.
[15]	GEERS M G D,BREKELMANS W A M,JANSSEN P J M.Size effects in miniaturized polycrystalline FCC samples:strengthening versus weakening[J].International Journal of Solids and Structures,2006,43(24):7304-7321.
[16]	YANG K,DONG P L,LI B Ch.Micro laser shock forming technology[J].Machinery Manufacture,2007,45(12):23-26(in Chinese).
[17]	CHEN H Q,YAO Y L,KYSAR J W.Spatially resolved characterization of residual stress induced by micro scale laser shock peening[J].Journal of Manufacturing Science and Engineering,2004,126(2):226-236.
[18]	MURR L E.Microstructure-mechanical property relations,shockwave and high-strain-rate phenomena in metals[M].New York:Plenum Press,1981:607-671.
[19]	CHEN H Q,WANG Y N,KYSAR J W,et al.Study of anisotropic character induced by microscale laser shock peening on a single crystal aluminum[J].J A P,2007,101(2):024904/1-024904/8.
[20]	WANG Y N,KYSAR J W,YAO Y L.Analytical solution of anisotropic plastic deformation induced by micro-scale laser shock peening[J].Mechanics of Materials,2008,40(3):100-114.
[21]	ZHANG W W,YAO Y L.Microscale laser shock peening of thin films,part 2:high spatial resolution material characterization[J].Journal of Manufacturing Science and Engineering,2004,126(1):18-24.
[22]	AKITA K,TANAKA H,SANO Y,et al.Compressive residual stress evolution process by laser peening[J].Materials Science Forum,2005,490/491:370-375.
[23]	CHEN H Q,KYSAR J W,YAO Y L.Characterization of plastic deformation induced by microscale laser shock peening[J].Journal of Applied Mechanics,2004,71(5):713-723.
[24]	CHEN H Q,YAO Y L,KYSAR J W,et al.Fourier analysis of X-ray micro-diffraction profiles to characterize laser shock peened metals[J].International Journal of Solids and Structures,2005,42(11/12):3471-3485.
[25]	ZHANG W,YAO Y L.Feasibility study of inducing desirable residual stress distribution in laser micromachining[J].Transactions of the North American Manufacturing Research Institution of SME,2001,29:413-420.

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通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

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Analysis and development of microscale laser shock peening oriented metalic components in MEMS

Corresponding author: ZHOU Jian-zhong, zhoujz@ujs.edu.cn;

1. School of Mechanical Engineering, Jiangsu University, Zhenjiang 212013, China

Received Date: 2009-09-07

Accepted Date: 2009-11-23

Available Online: 2010-09-25

Abstract: Laser shock peening suitable for metal micro components was introduced. The desirable compressive stress distribution might be induced by the control of process parameters and reasonable path,so the wear and fatigue resistance can be improved. The research status,mechanism, key technology and influence factors of microscale laser shock peening were summarized and the problems in microscale laser shock peening were analyzed, which provides guidance for further research.

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Reference (25)

[1]	van SPENGEN W M,PUERS R,MERTENS R,et al.A low frequency electrical test set-up for the reliability assessment of capacitive RF MEMS switches[J].Journal of Micromechanics and Microengineering,2003,13(5):604-612.
[2]	BRAZZLE J D,TAYLOR W P,GANESH B,et al.Solution hardened platinum alloy flexurematerials for improved performance and reliability of MEMS devices[J].Journal of Micromechanics and Microengineering,2004,15(1):43-48.
[3]	MILLER S L,RODGERS M S,la VIGNE G,et al.Failure modes in surface micromachined microelectromechanical actuation systems[J].Microelectronics Reliability,1999,38(8):1229-1237.
[4]	HENCK S A.Lubrication of digital micromirror devices[J].Tribology Letters,1997,3(3):239-247.
[5]	PATTON S T,ZABINSKI J S.Failure mechanisms of a MEMS actuator in very high vacuum[J].Tribology International,2002,35(6):373-379.
[6]	SMALLWOOD S A,EAPEN K C,PATTON S T,et al.Performance results of MEMS coated with a conformal DLC[J].Wear,2006,260(11/12):1179-1189.
[7]	PEYRE P,FABBRO R,MERRIEN P,et al.Laser shock processing of aluminum alloys application to high cycle fatigue behavior[J].Materials Science and Engineering,1996,210(1/2):102-113.
[8]	FAIRAND B P,CLAUER A H.Use of laser generated shocks to improve the properties of metals and alloys[J].SPIE,1976,86:112-119.
[9]	REN N F,YANG J Ch,CAN L.Effects of laser shocking on the mechanical properties of metals[J].Laser Technology,1998,22(4):235-238(in Chinese).
[10]	PARKER A.Shocked and stressed,metals get stronger[J].Science Technology Review,2001(3):26-28.
[11]	WANG G L,ZHOU J Zh,ZHANG X Q,et al.Application of laser-induced shock wave in surface modification and forming of sheet metal[J].Transactions of the Chinese Society for Agricultural Machinery,2005,36(12):148-152(in Chinese).
[12]	FABBRO R,FOURNIER J,BALLARD P,et al.Physical study of laser-produced plasma in confined geometry[J].J A P,1990,68(2):775-782.
[13]	ZHANG W W,YAO Y L.Micro scale laser shock processing of metallic components[J].Journal of Manufacturing Science and Engineering,2002,124(2):369-378.
[14]	ZHANG W W,YAO Y L.Microscale laser shock processing-modeling testing,and microstructure characterization[J].Journal of Manufacturing Processes,2001,3(2):128-143.
[15]	GEERS M G D,BREKELMANS W A M,JANSSEN P J M.Size effects in miniaturized polycrystalline FCC samples:strengthening versus weakening[J].International Journal of Solids and Structures,2006,43(24):7304-7321.
[16]	YANG K,DONG P L,LI B Ch.Micro laser shock forming technology[J].Machinery Manufacture,2007,45(12):23-26(in Chinese).
[17]	CHEN H Q,YAO Y L,KYSAR J W.Spatially resolved characterization of residual stress induced by micro scale laser shock peening[J].Journal of Manufacturing Science and Engineering,2004,126(2):226-236.
[18]	MURR L E.Microstructure-mechanical property relations,shockwave and high-strain-rate phenomena in metals[M].New York:Plenum Press,1981:607-671.
[19]	CHEN H Q,WANG Y N,KYSAR J W,et al.Study of anisotropic character induced by microscale laser shock peening on a single crystal aluminum[J].J A P,2007,101(2):024904/1-024904/8.
[20]	WANG Y N,KYSAR J W,YAO Y L.Analytical solution of anisotropic plastic deformation induced by micro-scale laser shock peening[J].Mechanics of Materials,2008,40(3):100-114.
[21]	ZHANG W W,YAO Y L.Microscale laser shock peening of thin films,part 2:high spatial resolution material characterization[J].Journal of Manufacturing Science and Engineering,2004,126(1):18-24.
[22]	AKITA K,TANAKA H,SANO Y,et al.Compressive residual stress evolution process by laser peening[J].Materials Science Forum,2005,490/491:370-375.
[23]	CHEN H Q,KYSAR J W,YAO Y L.Characterization of plastic deformation induced by microscale laser shock peening[J].Journal of Applied Mechanics,2004,71(5):713-723.
[24]	CHEN H Q,YAO Y L,KYSAR J W,et al.Fourier analysis of X-ray micro-diffraction profiles to characterize laser shock peened metals[J].International Journal of Solids and Structures,2005,42(11/12):3471-3485.
[25]	ZHANG W,YAO Y L.Feasibility study of inducing desirable residual stress distribution in laser micromachining[J].Transactions of the North American Manufacturing Research Institution of SME,2001,29:413-420.

Analysis and development of microscale laser shock peening oriented metalic components in MEMS

Abstract

References

Proportional views

通讯作者: 陈斌, bchen63@163.com

Proportional views