Analysis of ellipsometric data processing about transparent film on the transparent substrate
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1.
School of Physics and Telecommunication Engineering, South China Normal University, Guangzhou 510006, China
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Corresponding author:
HUANG Zuo-hua, zuohuah@scnu.edu.cn
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Received Date:
2008-11-25
Accepted Date:
2008-12-30
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Abstract
In order to solve the problem of the inversion ellipsometric parameter of transparent film on transparent substrate with iteration, the data processing method was analyzed in theory and verified in experiments.When the refractive index of film is closing to the refractive index of substrate,a mistake should happen in ellipsometric data inversion. According to the analysis,a new sub-iterative search method was presented to overcome the problem and a program of ellipsometric data processing was designed successfully with the tool of Labview.Finally,some of the samples were measured and the result compared with those presented in some literature.The experimental results show that the ellipsometric parameter of single-layer transparent film on transparent substrate is computed successfully,and the inversion have the advantages of high stability,speed and precision of up to 0.03nm.
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