Study on key technology for 3-D galvanometric scanners

WEN Shi-feng; SHI Yu-sheng; XIE Jun; CAI Dao-sheng

doi:10.3969/j.issn.1001-3806.2009.04.012

LASER TECHNOLOGY > 2009 > 33(4): 377-380. > DOI: 10.3969/j.issn.1001-3806.2009.04.012

WEN Shi-feng, SHI Yu-sheng, XIE Jun, CAI Dao-sheng. Study on key technology for 3-D galvanometric scanners[J]. LASER TECHNOLOGY, 2009, 33(4): 377-380. DOI: 10.3969/j.issn.1001-3806.2009.04.012

Citation:

WEN Shi-feng, SHI Yu-sheng, XIE Jun, CAI Dao-sheng. Study on key technology for 3-D galvanometric scanners[J]. LASER TECHNOLOGY, 2009, 33(4): 377-380. DOI: 10.3969/j.issn.1001-3806.2009.04.012

Citation:

WEN Shi-feng, SHI Yu-sheng, XIE Jun, CAI Dao-sheng. Study on key technology for 3-D galvanometric scanners[J]. LASER TECHNOLOGY, 2009, 33(4): 377-380. DOI: 10.3969/j.issn.1001-3806.2009.04.012

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Study on key technology for 3-D galvanometric scanners

State Key Laboratory of Material Processing and Die & Mould Technology, Material Science and Technology Institute, HuazhongUniversity Science and Technology, Wuhan 430073, China

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Received Date: June 09, 2008
Revised Date: September 07, 2008
Published Date: August 24, 2009

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Abstract

In order to design a 3-D galvanometric scanner with a large working field,its dynamic response capability,control algorithm and calibration algorithm were studied in detail. After selecting a servo motor with high dynamic response as the executive unit of the scanner,optimizing the scanning path and delay parameters,a 3-D scanner was developed successfully. A precise calibration model was designed to calibrate the scan image. This set of scanner was validated with it running for a long time. The scanner worked stably with repeating location precision of ≤30μm and scanning precision of 100mm ±0.1mm. The results show that the 3-D scanner has important application in large scanning fields.
- optical devices,
- galvanometric scanner,
- dynamic focus,
- dynamic capability,
- scanning accuracy

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