Study on key technology for 3-D galvanometric scanners

WEN Shi-feng; SHI Yu-sheng; XIE Jun; CAI Dao-sheng

doi:10.3969/j.issn.1001-3806.2009.04.012

In order to design a 3-D galvanometric scanner with a large working field,its dynamic response capability,control algorithm and calibration algorithm were studied in detail. After selecting a servo motor with high dynamic response as the executive unit of the scanner,optimizing the scanning path and delay parameters,a 3-D scanner was developed successfully. A precise calibration model was designed to calibrate the scan image. This set of scanner was validated with it running for a long time. The scanner worked stably with repeating location precision of ≤30μm and scanning precision of 100mm ±0.1mm. The results show that the 3-D scanner has important application in large scanning fields.

Study on key technology for 3-D galvanometric scanners

Corresponding author: SHI Yu-sheng, shiyusheng@263.net;

1. State Key Laboratory of Material Processing and Die & Mould Technology, Material Science and Technology Institute, HuazhongUniversity Science and Technology, Wuhan 430073, China

Received Date: 2008-06-10

Accepted Date: 2008-09-08

Available Online: 2009-08-25

Abstract: In order to design a 3-D galvanometric scanner with a large working field,its dynamic response capability,control algorithm and calibration algorithm were studied in detail. After selecting a servo motor with high dynamic response as the executive unit of the scanner,optimizing the scanning path and delay parameters,a 3-D scanner was developed successfully. A precise calibration model was designed to calibrate the scan image. This set of scanner was validated with it running for a long time. The scanner worked stably with repeating location precision of ≤30μm and scanning precision of 100mm ±0.1mm. The results show that the 3-D scanner has important application in large scanning fields.

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Reference (10)

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Study on key technology for 3-D galvanometric scanners

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