High reflectivity aluminum film processed by nanosecond pulse laser

WU Peng; FAN Yunru; GUO Jiawei; LIU Xiaoxu; ZHOU Qiang; DENG Guangwei; SONG Haizhi; WANG You

doi:10.7510/jgjs.issn.1001-3806.2019.06.009

LASER TECHNOLOGY > 2019 > 43(6): 779-783. > DOI: 10.7510/jgjs.issn.1001-3806.2019.06.009

WU Peng, FAN Yunru, GUO Jiawei, LIU Xiaoxu, ZHOU Qiang, DENG Guangwei, SONG Haizhi, WANG You. High reflectivity aluminum film processed by nanosecond pulse laser[J]. LASER TECHNOLOGY, 2019, 43(6): 779-783. DOI: 10.7510/jgjs.issn.1001-3806.2019.06.009

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High reflectivity aluminum film processed by nanosecond pulse laser

1.
Southwest Institute of Technical Physics, Chengdu 610041, China
2.
Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China, Chengdu 610054, China

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Received Date: March 27, 2019
Revised Date: April 11, 2019
Published Date: November 24, 2019

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Abstract

In order to study the feasibility and effect of fabrication of metal films with high reflectivity based on near infrared nanosecond pulsed laser, high reflectivity aluminium films were fabricated by nanosecond pulsed laser. Under the conditions of different laser spot sizes and different laser energy, the change of ablation morphology on the surface of aluminium film was measured. The results show that, even if surface reflectivity of aluminium film is as high as 96%, the aluminum film can still be processed by laser. The ablation pattern of defocusing (energy density less than 1000J/mm²) on the surface of aluminium film by high power laser is more regular than that of focusing (energy density greater than 2000J/mm²) on the surface of aluminium film by low power laser. The relevant experimental results can play a guiding role in the selection of laser parameters in laser processing of high reflectivity material.
- laser technique,
- laser processing,
- nanosecond pulse,
- high reflectivity,
- Al film

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