Experimental study about water-assisted laser drill on Al2O3 ceramics without recast layer
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摘要: 为了解决传统加工过程中重铸层无法消除的问题，采用超快皮秒激光创新性地在水介质中对Al2O3陶瓷进行皮秒激光钻孔实验，并与空气中钻孔结果进行对比，研究了皮秒激光主要参量如单脉冲能量、扫描次数等对陶瓷微孔的孔径、锥度和重铸层厚度的影响规律，并分析讨论不同介质中皮秒激光与Al2O3陶瓷相互作用机理及材料去除机制。结果表明，在水介质中激光钻孔直径增加约35μm、微孔锥度降低至1.04°并可获得无重铸层钻孔效果；激光作用过程中水的存在会引起空泡作用、吸收作用和运输作用，有效防止了去蚀材料二次黏附，消除了重铸层和降低了微孔锥度，提升了微孔质量。该研究阐述了水辅助激光钻孔的具体影响状况并加深了对水辅助的影响机理理解。Abstract: In order to solve the problem that recastation layer can not be eliminated in traditional process, ultrafoot picosecond laser was used to do the drilling experiment of Al2O3 ceramics in water medium. Compared with the drilling results in the air, the influences of main parameters such as single pulse energy and scanning frequency on pore size, taper and thickness of ceramic micro pores were analyzed. Interaction mechanism between picosecond laser and Al2O3 ceramics and material removal mechanism with different media were analyzed and discussed. The results show that, the diameter of laser drilling in water medium increases by about 35μm, micropore taper reduces to 1.04° and the effect of no reclamation layer drilling can be obtained. The presence of water in the process of laser drilling can cause vacuolization, absorption and transportation.It can effectively prevent the secondary adhesion of erosion material, eliminate re-cast layer and reduce micro-hole taper and improve the quality of micro-porous. The study describes the specific impact of water-assisted laser drilling and deepens the understanding of the mechanism of water-assisted effects.
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Keywords:
- laser technique /
- water-assisted machining /
- laser drilling /
- Al2O3 ceramics
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Figure 5. Effect of laser parameters on hole diameter and taper of alumina ceramics
a—hole diameter in air b—hole diameter in water c—taper in air d—taper in water
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Figure 7. Scanning electron microscope picture of the drilled sample
a, b—in air c, d—in water
Table 1 Physical parameters of soda-lime glass
properties reference value melting point 2072℃ boiling point 2977℃ density 3.72g/cm3 heat capacity 880J/(kg·K) elasticity modulus 74GPa shear modulus 300GPa coefficient of thermal expansion 8.2×10-6K-1 
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