Design of control system in electromagnetic interference environment of discharge excimer laser
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摘要: 为了在放电激励准分子激光的电磁干扰环境下，实现有效的抗干扰控制系统设计，采用全光纤接口设计和基于电压频率转换实现的高精度模拟信号传输的方法，取得了放电准分子激光空间电磁干扰强度和压频转换波形等数据，进行了理论分析和实验验证。结果表明，在最强电场干扰14V/m、最强磁场干扰38A/m的条件下，系统能够实现误差小于2.5%的模拟信号稳定传输，工作稳定可靠。这一结果对分析和设计能够稳定工作并抗干扰的准分子激光器控制系统是有帮助的。Abstract: In order to design an effective anti-interference control system in discharge electromagnetic interference environment with excimer laser, the method of all-fiber-interface design and high-precision analog signal transmission based on voltage frequency conversion were taken. After theoretical analysis and experimental verification, the data of space electromagnetic interference intensity of discharge excimer laser and voltage frequency conversion waveform were collected. The results show that, under the condition of the max electric field intensity within 14V/m and the max magnetic field intensity within 38A/m, the system of transmitting the analog signal works stably and reliably with error of less than 2.5%. The study is helpful for analyzing and designing stable and anti-interference excimer laser control system.
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Figure 5. Oscillogram of voltage/frequency converter(C1—voltage signal; C2—frequency signal)
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