Abstract: In order to design an effective anti-interference control system in discharge electromagnetic interference environment with excimer laser, the method of all-fiber-interface design and high-precision analog signal transmission based on voltage frequency conversion were taken. After theoretical analysis and experimental verification, the data of space electromagnetic interference intensity of discharge excimer laser and voltage frequency conversion waveform were collected. The results show that, under the condition of the max electric field intensity within 14V/m and the max magnetic field intensity within 38A/m, the system of transmitting the analog signal works stably and reliably with error of less than 2.5%. The study is helpful for analyzing and designing stable and anti-interference excimer laser control system.