基于光学相干层析成像技术的薄膜厚度测量

基金项目:

渭南市自然科学基础研究计划资助项目(2011KYJ-3);渭南师范学院科研计划资助项目(12YKS021)

详细信息

Film thickness measurement based on optical coherence tomography

School of Physics and Electrical Engineering, Weinan Teachers University, Weinan 714000, China

摘要: 为了对薄膜厚度进行测量,采用白光谱域光学相干层析成像的测量方法,进行了理论分析和实验验证,对以玻璃为基片的单层和多层薄膜样品进行了层析成像实验,获得了样品的2维层析图像。结果表明,该系统不仅能显示薄膜样品内部的微观结构,而且能从2维层析图像中得到单层和多层薄膜的厚度(分别为68μm和30μm),测量值与理论值相吻合,从而验证了测量理论正确性。该系统具有较高分辨率,可实现快速成像,满足实际工业测量需要。
- 测量与计量 /
- 薄膜厚度 /
- 谱域 /
- 光学相干层析成像
Abstract: A measuring method based on white-light spectral-domain optical coherence tomography was used to measure thin film thickness.The theory was analyzed and the experiment was done.The single-layer and multi-layer thin film on glass substrate was used for imaging experiments respectively and 2-D cross-sectional images were obtained.The experiment shows that system can not only measure the inner microstructure of the film,but also measure the film thickness of single-layer and multi-layer film in 68μm and 30μm respectively.The measured value is the same as the theoretical value,which verifies the validity of the theory.The system has high imaging speed and resolution,and can meet the industrial measurement.
- measurement and metrology /
- thin films thickness /
- spectral-domain /
- optical coherence tomography

[1]	CHANG Sh D,MAO Y X,COSTEL F,et al.Optical coherence tomography:technology and applications[J].Proceedings of SPIE, 2009,7156:1-8.
[1]	HUANG D,SWANSON E A,LIN C P,et al.Optical coherence tomography[J].Science,1991,254(5035):1178-1181.
[2]	FERCHER A F,DREXLER W,HITZENBERGER C K,et al.Optical coherence tomography-principles and applications[J].Reports on Progress in Physics,2003,66(2):239-303.
[3]	WIESAUER K,PIRCHER M,GOTZINGER E,et al.En-face scanning optical coherence tomography with ultra-high resolution for material investigation[J].Optics Express,2005,13(3):1015-1024.
[4]	CHANG Sh D,MAO Y X,CHANG G M,et al.Jade detection and analysis based on optical coherence tomography images[J].Optical Engineering,2010,49(6):1-6.
[5]	LEITHEB R,HIEZENBERGER C K,FERCHER A F.Performance of fourier domain vs.time domain optical coherence tomography[J]. Optics Express,2003,11(8):889-894.
[6]	de BOER J F,CENSE B,PARK B H,et al.Improved signal-tonoise ratio in spectral-domain compared with time-domain optical coherence tomography[J].Optics Letters,2003,28(21):2067-2069.
[7]	YUN S H,TEARNDY G J,de BOER J F,et al.High-speed optical frequency-domain imaging[J].Optics Express,2003,11(22):2953-2963.
[8]	FERCHER A F,HITZENBERGER C K,KAMP G,et al.Measurement of intraocular distances by backscattering spectral interferometry[J].Optics Communications,1995,117(1/2):443-448.
[9]	TARGOWSKI P,WOJTKOWSKI M,KOWALCZYK A,et al.Complex spectral OCT in human eye imaging in vivo[J].Proceedings of SPIE,2003,5140:28-32.