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垂直腔面发射激光器阵列的热设计研究进展

金冬月, 洪福临, 张万荣, 张洪源, 王毅华, 王焕哲, 王楷尧, 关宝璐

金冬月, 洪福临, 张万荣, 张洪源, 王毅华, 王焕哲, 王楷尧, 关宝璐. 垂直腔面发射激光器阵列的热设计研究进展[J]. 激光技术, 2024, 48(6): 777-789. DOI: 10.7510/jgjs.issn.1001-3806.2024.06.002
引用本文: 金冬月, 洪福临, 张万荣, 张洪源, 王毅华, 王焕哲, 王楷尧, 关宝璐. 垂直腔面发射激光器阵列的热设计研究进展[J]. 激光技术, 2024, 48(6): 777-789. DOI: 10.7510/jgjs.issn.1001-3806.2024.06.002
shu
JIN Dongyue, HONG Fulin, ZHANG Wanrong, ZHANG Hongyuan, WANG Yihua, WANG Huanzhe, WANG Kaiyao, GUAN Baolu. Advances in thermal design of vertical cavity surface emitting laser array[J]. LASER TECHNOLOGY, 2024, 48(6): 777-789. DOI: 10.7510/jgjs.issn.1001-3806.2024.06.002
Citation: JIN Dongyue, HONG Fulin, ZHANG Wanrong, ZHANG Hongyuan, WANG Yihua, WANG Huanzhe, WANG Kaiyao, GUAN Baolu. Advances in thermal design of vertical cavity surface emitting laser array[J]. LASER TECHNOLOGY, 2024, 48(6): 777-789. DOI: 10.7510/jgjs.issn.1001-3806.2024.06.002
shu

垂直腔面发射激光器阵列的热设计研究进展

  • 北京工业大学 信息科学技术学院, 北京 100124, 中国

基金项目: 

激光器件技术重点实验室开放基金资助项目 KLLDT202306

国家自然科学基金资助项目 61575008

国家自然科学基金资助项目 61901010

国家自然科学基金资助项目 61774012

国家自然科学基金资助项目 61775007

北京市自然科学基金资助项目 4172011

国家自然科学基金资助项目 60908012

国家自然科学基金资助项目 61006059

详细信息
    通讯作者:

    关宝璐, gbl@bjut.edu.cn

  • 中图分类号: TN248.4

Advances in thermal design of vertical cavity surface emitting laser array

  • School of Information Science and Technology, Beijing University of Technology, Beijing 100124, China

摘要

    摘要
  • 摘要: 垂直腔面发射激光器(VCSEL)通常采用由小尺寸发光单元并联的2维阵列结构来提高输出光功率、改善激光光束质量，然而随着芯片尺寸不断缩小以及阵列集成度不断提高，由VCSEL单元自身功耗引起的自加热效应及各单元之间的热耦合效应将导致VCSEL阵列结温急剧上升，在热-光-电反馈作用下，将严重制约VCSEL阵列的光学性能及热可靠性，对VCSEL阵列热设计提出了迫切要求。在阐明VCSEL阵列产热机理的基础上，从热-光-电模型建立、热设计方法两方面归纳总结了VCSEL阵列热设计最新进展，并对热设计发展趋势进行了展望。
    Abstract: Vertical-cavity surface-emitting laser (VCSEL) usually adopt a 2-D array structure with small-sized light-emitting cells in parallel to increase the output optical power and to improve the laser beam quality. However, with the down scaling of the chip size and the increasing of the array integration, the self-heating effect caused by the power dissipation of the VCSEL cell and the thermal coupling effect among VCSEL cells will lead to a sharp increase in the junction temperature of the VCSEL array. Due to the effect of thermal-opto-electro feedback, the optical performance and thermal reliability of the VCSEL array will be limited seriously, which propose urgent requirements for the thermal design of the VCSEL array. Based on the heat generation mechanism of VSCEL array, latest development of VCSEL array thermal design was reviewed in detail from the aspects of thermal-opto-electro modeling and thermal design methodology. The development trend of thermal design in VCSEL array was also prospected.
    • HTML全文

  • 图  1   具有4×4个单元的VCSEL阵列结构示意图[15]

    Figure  1.   Schematic device structure of a 4×4 VCSEL array[15]

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    图  2   具有M×N个单元的VCSEL阵列2维热网络[15]

    Figure  2.   2-D thermal network of VCSEL array with M×N cells[15]

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    图  3   VCSEL激光器初级热-光-电模型等效电路[21]

    Figure  3.   Equivalent-circuit of simple thermal-opto-electro model of VCSEL[21]

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    图  4   VCSEL阵列的电路级热-光-电模型等效电路[25]

    Figure  4.   Equivalent-circuit of VCSEL array thermal-opto-electro model[25]

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    图  5   VCSEL的电路级热-光-电模型等效电路[26]

    Figure  5.   Equivalent-circuit of VCSEL thermal-opto-electro model[26]

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    图  6   VCSEL热-电解析模型流程图[27]

    Figure  6.   Flow chart of VCSEL thermal-electro analytical model[27]

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    图  7   行为级的VCSEL热-光-电解析模型流程图[29]

    Figure  7.   Flow chart of a behavioral VCSEL thermal-opto-electro analytical model[29]

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    图  8   VCSEL激光器2维热-电有限元模型[33]

    Figure  8.   2-D thermal-electro finite element model of VCSEL[33]

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    图  9   VCSEL激光器2维热光有限元模型[36]

    Figure  9.   2-D thermal-opto finite element model of VCSEL[36]

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    图  10   基于有限元热模型的VCSEL截面温度、热流密度分布[38]

    Figure  10.   Temperature and heat flux distribution in cross-section of VCSEL with finite element thermal model[38]

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    图  11   基于有限元热-电模型的VCSEL阵列横向热流和温度分布[41]

    Figure  11.   Heat flux and temperature distribution in lateral direction for VCSEL array with finite element thermal-electro model[41]

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    图  12   VCSEL阵列3-D有限元热-电模型[42]

    a—表面温度分布 b—2维有源层温度分布 c—2维有源层折射率分布

    Figure  12.   3-D finite element model thermal-electro model of VCSEL array[42]

    a—temperature distribution in device surface b—2-D temperature distribution in active layer c—2-D refractive index in active layer

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    图  13   具有非闭合型电极结构的VCSEL阵列表面示意图[44]

    Figure  13.   Surface schematic of VCSEL array with non-closed electrode structure[44]

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    图  14   环形紧密堆积结构VCSEL阵列的原理图[45]

    Figure  14.   Schematic diagram of the ring close packing structure VCSEL array[45]

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    图  15   具有19个单元的准蜂巢结构VCSEL阵列显微图[46]

    Figure  15.   Microscope images of honeycomb geometry structure VCSEL arrays with 19 cells[46]

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    图  16   采用独立寻址技术的5×5单元VCSEL阵列显微图[47]

    Figure  16.   Microscope images of 5×5 VCSEL arrays with independent addressing technology[47]

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    图  17   氧化孔径对VCSEL输出特性的影响[54]

    Figure  17.   Influence of oxide aperture on the output characteristics of VCSEL[54]

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    图  18   VCSEL阵列非均匀氧化孔径设计[55]

    Figure  18.   Non-uniform oxidation aperture design of VCSEL array[55]

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    图  19   单元间距对VCSEL阵列温度分布的影响[56]

    Figure  19.   Effect of cell spacing on the temperature distribution of the VCSEL array[56]

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    图  20   3种VCSEL阵列单元排布方式[4]

    Figure  20.   Three-types of cell arrangement in VCSEL array[4]

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    图  21   六边形单元排布设计对VCSEL阵列温度分布的影响[15]

    Figure  21.   Influence of hexagonal cell arrangement design on the temperature profile of VCSEL array[15]

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    图  22   耦合线示意图[57]

    Figure  22.   Schematic coupling line[57]

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    图  23   a—遍历设计算法示意图[59] b—优化的VCSEL阵列温度分布[59]

    Figure  23.   a—schematic of the traversal algorithm[59] b—the temperature profile of the optimized VCSEL array[59]

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    图  24   自组织算法示意图[60]

    Figure  24.   Schematic diagram of self-organizing algorithm[60]

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