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基于波数扫描干涉的表面轮廓测量

何艳敏, 谢创亮, 许卓明, 鲍鸿, 叶双莉, 周延周

何艳敏, 谢创亮, 许卓明, 鲍鸿, 叶双莉, 周延周. 基于波数扫描干涉的表面轮廓测量[J]. 激光技术, 2016, 40(3): 392-396. DOI: 10.7510/jgjs.issn.1001-3806.2016.03.019
引用本文: 何艳敏, 谢创亮, 许卓明, 鲍鸿, 叶双莉, 周延周. 基于波数扫描干涉的表面轮廓测量[J]. 激光技术, 2016, 40(3): 392-396. DOI: 10.7510/jgjs.issn.1001-3806.2016.03.019
HE Yanmin, XIE Chuangliang, XU Zhuoming, BAO Hong, YE Shuangli, ZHOU Yanzhou. Profilemetry measurement based on wavenumber scanning interferometry[J]. LASER TECHNOLOGY, 2016, 40(3): 392-396. DOI: 10.7510/jgjs.issn.1001-3806.2016.03.019
Citation: HE Yanmin, XIE Chuangliang, XU Zhuoming, BAO Hong, YE Shuangli, ZHOU Yanzhou. Profilemetry measurement based on wavenumber scanning interferometry[J]. LASER TECHNOLOGY, 2016, 40(3): 392-396. DOI: 10.7510/jgjs.issn.1001-3806.2016.03.019

基于波数扫描干涉的表面轮廓测量

基金项目: 

国家自然科学基金资助项目(51371129;11174226);广东省自然科学基金资助项目(1414050002003);广州市科技计划资助项目(2014J4100203)

详细信息
    作者简介:

    何艳敏(1990-),男,硕士研究生,现主要从事3-D机器视觉的研究。

    通讯作者:

    鲍鸿,E-mail:bhong@gdut.edu.cn

  • 中图分类号: TN247

Profilemetry measurement based on wavenumber scanning interferometry

  • 摘要: 为了高精度测量被测物体表面3维轮廓,采用半导体激光器波数扫描干涉的方法,对激光波数扫描干涉进行了理论分析和实验验证。在迈克尔逊干涉系统的参考端引入一个光楔,通过2-D傅里叶变换提取光楔干涉图像的相位,在线检测激光器输出波数变化,最后对所有时间分辨干涉图像序列进行随机采样傅里叶变换,还原被测物体表面3维轮廓。结果表明,轮廓测量精度达到6.7nm。该方法特别适合于机械零件的质量检验。
    Abstract: In order to measure 3-D profile of a sample with high accuracy, wavenumber-scanning interferometry was used. An optical wedge was used as reference terminal of a Michelson interferometer system. The phases of wedge interference image were extracted by 2-D Fourier transform. The changes of output wavenumber were detected on line. Finally, all the time-resolved interferometry image sequences were sampled by Fourier transform random. The 3-D contour of object surface was restored with high precision. The profile of a sample object was constructed with the resolution of 6.7nm. The proposed method is particularly suitable for quality inspection of mechanical parts.
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出版历程
  • 收稿日期:  2015-04-13
  • 修回日期:  2015-05-11
  • 发布日期:  2016-05-24

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