高级检索

激光打标中振镜几何畸变误差多项式拟合校正

彭留永, 王宣雅, 周建涛, 裴红星

彭留永, 王宣雅, 周建涛, 裴红星. 激光打标中振镜几何畸变误差多项式拟合校正[J]. 激光技术, 2013, 37(5): 601-604. DOI: 10.7510/jgjs.issn.1001-3806.2013.05.009
引用本文: 彭留永, 王宣雅, 周建涛, 裴红星. 激光打标中振镜几何畸变误差多项式拟合校正[J]. 激光技术, 2013, 37(5): 601-604. DOI: 10.7510/jgjs.issn.1001-3806.2013.05.009
PENG Liu-yong, WANG Xuan-ya, ZHOU Jian-tao, PEI Hong-xing. Polynomial fitting correction of galvanometer geometric distortion error in laser marking[J]. LASER TECHNOLOGY, 2013, 37(5): 601-604. DOI: 10.7510/jgjs.issn.1001-3806.2013.05.009
Citation: PENG Liu-yong, WANG Xuan-ya, ZHOU Jian-tao, PEI Hong-xing. Polynomial fitting correction of galvanometer geometric distortion error in laser marking[J]. LASER TECHNOLOGY, 2013, 37(5): 601-604. DOI: 10.7510/jgjs.issn.1001-3806.2013.05.009

激光打标中振镜几何畸变误差多项式拟合校正

基金项目: 

国家自然科学基金资助项目(10974183)

详细信息
    作者简介:

    彭留永(1985- ),男,硕士研究生,现主要从事误差分析、嵌入式系统、数据库的研究。

    通讯作者:

    裴红星,E-mail:phxlee@zzu.edu.cn

  • 中图分类号: 

    TN249

Polynomial fitting correction of galvanometer geometric distortion error in laser marking

  • 摘要: 为了消除激光打标系统中由2维振镜物镜前扫描引起的打标点几何畸变误差,分析误差产生的原因,在振镜扫描角度(,)理想计算公式的基础上,采用最小二乘曲线拟合的方法,得到用打标点坐标(x,y)表示的补偿(,)误差的拟合多项式,从而对激光打标点的畸变误差进行了校正。通过校正,可以将激光打标点的最大几何畸变误差由3.2mm降至20m以内,且计算量小、速度快。结果表明,该误差校正算法可以满足高速、高精度激光打标的需要;同时可通过改变物镜焦距计算出新的补偿公式,以应用于不同参量的激光打标系统。
    Abstract: In order to eliminate geometric distortion error of marking point caused by 2-D galvanometer scan before the objective in laser marking system, the causes of the distortion was analyzed in detail. On the basis of the ideal formula of galvanometer deflection angle (,), using the least squares curve fitting method, a fitting polynomial for compensating the errors of (,) with the marking point coordinates (x,y) was obtained and the distortion error of the galvanometer laser marking point was corrected. After correction, the maximum geometric distortion error of the laser marking point can be reduced from 3.2mm down to less than 20m with smaller amount of calculation and faster speed. The results show that this error correction algorithm can meet the requirements of high-speed, high-precision laser marking. At the same time, new compensation formula can be calculated by changing the objective lens focal length to be applied to the different parameters laser marking system.
  • [1]

    TANG Y J. Design of laser marking controller based on DSP[D]. Hefei: Hefei University of Technology,2010:2-3(in Chinese).

    [2]

    HAN W P,MENG W,LI Y X,et al. Correction model mixed with least-square and grid method for dual galvanometric scanning[J].Laser Technology,2012,36(2): 179-187(in Chinese).

    [3]

    ZHU L Q.Error analysis and correcting method of the two vibrational mirrors scanning system[J].Applied Laser,2001,21(5):325-327(in Chinese).

    [4]

    WAN Z,DU W X.Calibration of graphic distortion and compensation of exposure for dual galvanometer scanning[J].Optics and Precision Engineering,2000,8(2):115-118(in Chinese).

    [5]

    WEN S F,SHI Y S,XIE J,et al.Study on key technology for 3-D galvanometric scanners[J].Laser Technology,2009,33(4):377-380(in Chinese).

    [7]

    GUO F,HU B,YING H S,et al. Hardware correction for distortion of dual galvanometer scanning[J].Laser Technology,2003,27(4): 337-341 (in Chinese).

    [8]

    SHI W Q. Research on laser micro-welding based on scanning galvanometers[D].Guangzhou: South China University of Technology,2009:56-57(in Chinese).

    [9]

    JI Y Q. Study on optical design of large working area F-theta lens[D].Suzhou: Suzhou University,2006:7-8(in Chinese).

    [10]

    HAN W P,MENG W,LI Y X,et al.Error analysis and correction methods of dual galvanometer scanning[J].Elecrto-Optic Technology Application,2011,26(4): 14-18(in Chinese).

    [11]

    WEN S F. Study of galvanometric scan and control system in selective laser sintering[D]. Wuhan: Huazhong University of Science and Technology,2010:20-31(in Chinese).

    [12]

    XU S L. Numerical analysis and algorithms[M]. Beijing: China Machine Press,2008:266-276(in Chinese).

计量
  • 文章访问数:  5
  • HTML全文浏览量:  0
  • PDF下载量:  9
  • 被引次数: 0
出版历程
  • 收稿日期:  2012-11-27
  • 修回日期:  2013-01-04
  • 发布日期:  2013-09-24

目录

    /

    返回文章
    返回