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激光能量对沉积纳米Si薄膜晶粒尺寸的影响

陈俊领 段国平 黄明举

引用本文:
Citation:

激光能量对沉积纳米Si薄膜晶粒尺寸的影响

    作者简介: 陈俊领(1980- ),男,硕士研究生,主要从事硅薄膜方面的研究..
    通讯作者: 陈俊领, hmingju@163.com
  • 基金项目:

    省部共建河南大学科研基金资助项目(SBGJ090513)

  • 中图分类号:

    O782

Influence of laser energy on average size of Si nanoparticles deposited in thin film

    Corresponding author: CHEN Jun-ling, hmingju@163.com ;
  • CLC number:

    O782

  • 摘要: 为了制备纳米硅薄膜,采用脉冲激光沉积系统,保持靶材和衬底间距不变,在不同激光能量条件下,得到一系列纳米Si薄膜。利用喇曼散射光谱和X射线衍射谱对晶粒尺寸进行了计算和分析,取得了几组数据。结果表明,改变脉冲激光能量时,纳米Si晶粒平均尺寸均随能量的增强先增大后减小;在单脉冲能量为300mJ时制备的纳米Si晶粒平均尺寸最大,为8.58nm。这一结果对纳米硅薄膜制备的研究有积极意义。
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出版历程
  • 收稿日期:  2011-07-27
  • 录用日期:  2011-09-05
  • 刊出日期:  2012-05-25

激光能量对沉积纳米Si薄膜晶粒尺寸的影响

    通讯作者: 陈俊领, hmingju@163.com
    作者简介: 陈俊领(1980- ),男,硕士研究生,主要从事硅薄膜方面的研究.
  • 1. 河南大学 物理与电子学院 河南省光电信息材料与器件重点学科开放实验室 开封 475001
基金项目:  省部共建河南大学科研基金资助项目(SBGJ090513)

摘要: 为了制备纳米硅薄膜,采用脉冲激光沉积系统,保持靶材和衬底间距不变,在不同激光能量条件下,得到一系列纳米Si薄膜。利用喇曼散射光谱和X射线衍射谱对晶粒尺寸进行了计算和分析,取得了几组数据。结果表明,改变脉冲激光能量时,纳米Si晶粒平均尺寸均随能量的增强先增大后减小;在单脉冲能量为300mJ时制备的纳米Si晶粒平均尺寸最大,为8.58nm。这一结果对纳米硅薄膜制备的研究有积极意义。

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