G-APD arrays——a three dimensional imaging detector with single photon sensitivity
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摘要: 介绍了一种利用盖革模式雪崩二极管(G-APD)作为成像单元的新型阵列光电探测器,重点介绍了该新型成像光电探测器的关键技术、器件研发和系统应用的发展状况。G-APD阵列探测器兼具单光子探测灵敏度和皮秒级时间分辨率两大特点,适用于对极微弱光目标的三维成像探测。同时,G-APD阵列探测器又是一种全固态的光电探测器件,不仅体积小、重量轻、可靠性高,而且还可用现有的微光电子工艺进行规模化生产。因此,G-APD阵列是目前阵列光电探测器件的一个重大发展,必将在各种高端光电成像领域获得广泛的应用。Abstract: A novel photonics detector arrays consisted of Geiger-mode avalanche photodiodes(G-APD) was introduced.The key techniques,device developments and system integration of this new image detector were emphasized.A G-APD array detector has two outstanding characters:single photon sensitivity and pico-second resolving power,which makes the detector very suitable for the weak optical signal 3-D imaging.On the other hand,the G-APD array detector is all-solid state photonics detection device.It has small size,light weight and high reliability,and it can be mass manufactured with nowadays matured micro photonics device process.Therefore,G-APD array is a great advantage at the array photonics detector development,and it will be applied widely in the advanced photonics imaging area.
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