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脉冲激光制备ZnO薄膜烧蚀过程中的温度演化

The development of temperature in target ablation of pulsed laser deposition of ZnO thin film

  • 摘要: 为了研究脉冲激光烧蚀氧化锌靶材的整个过程,给出脉冲激光作用块状靶材的烧蚀模型.从包含热源项的导热方程出发,利用适当的动态边界条件,详细研究了靶材在熔融前的温度分布规律.结果表明,靶材熔融前,在固定位置,温度随时间推移而升高,且距离靶面越近,变化率越大.在同一时刻不同位置,温度随着热扩散距离增加而下降;并采用精确解与积分近似法相结合的方案,给出熔融后固液两相的温度分布与时间和位置的变化关系.液相的温度梯度随扩散距离增加而下降,在距烧蚀面0.5μm之内,温度梯度很大;在0.5μm后面的部分,温度变化就很缓慢;固相的温度变化较为复杂.

     

    Abstract: The whole ablation process of target ZnO heated by pulsed laser was studied.The ablating model of a bulk target irradiated by a pulse laser was set up.Under the appropriate dynamic boundary conditions,the heat flow equation with heat generation term,and the temperature distribution of target before and after the melting were studied in detail.The results showed that before the melting,at a fixed location,the temperature increased with the ablation time.The less the heat diffusion distance was,the faster the variety rate of the temperature was.At the same time,in different location,the temperature decreased gradually along with the increase of the heat diffusion distance.Using the combination of analytical method and integral-approximation method,and solving the heat flow equation,the temperature distribution of solid and liquid phases's functions of time and location were obtained.The temperature grad of liquid phases decreased with the increase of the heat diffusion distance.Within 0.5 micron distance from the ablation surface,the temperature grad of liquid phases was great;beyond 0.5 micron,the variety rate of the temperature became very slow;while the temperature distribution of solid phases was more complex.

     

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