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离子束辅助沉积制备高功率激光薄膜的研究

张大伟 贺洪波 邵建达 范正修

引用本文:
Citation:

离子束辅助沉积制备高功率激光薄膜的研究

    作者简介: 张大伟(1977- ),男,讲师,研究方向是薄膜及离子束技术.E-mail:dwzhang@siom.ac.cn.
  • 中图分类号: O484.1

Preparation of high power laser films based on ion beam assisted deposition

  • CLC number: O484.1

  • 摘要: 综述了离子束辅助沉积技术在高功率激光薄膜制备中的应用研究进展.指出该技术在制备高激光损伤阈值的薄膜中存在的问题,即出现过高的堆积密度,会给薄膜带来杂质缺陷、化学计量比缺陷、损伤缺陷、晶界缺陷,制备薄膜的残余应力存在着压应力增加的趋势,会改变薄膜的晶体结构等.并指出了该研究领域的研究方向.
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出版历程
  • 收稿日期:  2006-10-20
  • 录用日期:  2007-01-17
  • 刊出日期:  2008-02-25

离子束辅助沉积制备高功率激光薄膜的研究

    作者简介: 张大伟(1977- ),男,讲师,研究方向是薄膜及离子束技术.E-mail:dwzhang@siom.ac.cn
  • 1. 上海理工大学, 光学与电子工程学院, 上海, 200093;
  • 2. 中国科学院上海光学精密机械研究所, 上海, 201800

摘要: 综述了离子束辅助沉积技术在高功率激光薄膜制备中的应用研究进展.指出该技术在制备高激光损伤阈值的薄膜中存在的问题,即出现过高的堆积密度,会给薄膜带来杂质缺陷、化学计量比缺陷、损伤缺陷、晶界缺陷,制备薄膜的残余应力存在着压应力增加的趋势,会改变薄膜的晶体结构等.并指出了该研究领域的研究方向.

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