Measuring tiny displacement based on moderate optical feedback self-mixing interferometry
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摘要: 光反馈自混合干涉技术是一种新出现的有别于传统双光束干涉的一类新的测试技术。为了在适度光反馈下进行位移的精密测量,提出了一种基于适度光反馈自混合干涉技术的位移测量方法。采用条纹记数法实现大范围位移粗测,具有半波长位移分辨力;然后基于适度光反馈下小数条纹的特点,给出了小于半波长位移测量的方法,从而提高位移测量的分辨力。用绝对精度达3nm的商用压电陶瓷驱动器比对实验,结果验证了这种三角波调制外反射体在普通实验室环境噪声中可以达到纳米级的位移测量精度。实验数据处理结果表明,对于3μm以下的位移,该算法位移测量相对误差约为1.20%。Abstract: Optical feedback self-mixing interferometry is an emerging sensing and measurement technique,which is quite different with traditional double-beam interferometry.To perform precision displacement measurement under the condition of moderate optical feedback,a displacement measurement method was proposed based on moderate optical feedback self-mixing interference.Firstly,rough measurement of displacement was carried out by counting the fringe numbers with the resolution of half wavelength.Then based on the study of fractional fringe structure details,a measurement means for displacement within half wavelength was derived.Calibration results with a commercial piezoelectric ceramics which translates in the order of 3nm show that a displacement accuracy of nanometers scale is achieved in the common laboratorial environment.The results indicate the relative standard deviation of bΔL is 1.20% within the displacement less than 3μm.
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[1] WANG W M,GRATTAN K T V,BOVLE W J O,et al.Active optical feedback in a dual-diode laser configuration applied to displacement measurements with a wide dynamic range[J].Appl Opt,1994,33(10):1795-1801.
[2] YU Y G,GUIDO G,SILVANO D.Measurement of the linewidth enhancement factor of semiconductor lasers based on the optical feedback self-mixing effect[J].IEEE Photonics Technology Letters,2004,16(4):990-992.
[3] LORENZO S,YU Y G,GUIDO G,et al.Self-mixing laser diode velocimetry:application to vibration and velocity measurement[J].IEEE Transactions on Instrumentation and Measurement,2004,53(1):223-232.
[4] LI Sh Y,YU Y G,YE H Y,et al.The estimation of the parameters in the model of the self-mixing effect in semiconductor lasers[J].Laser Technology,2005,29(5):519-521(in Chinese).
[5] LIU G,ZHANG Sh L,ZHU J,et al.Interference of two beams in a He-Ne laser with optical feedback[J].Laser Technology,2003,27(5):470-472(in Chinese).
[6] YU Y G,YE H Y,YAO J Q.Steady solution to the self-mixing interference system for measuring displacement[J].Acta Optica of Sinica,2003,23(1):80-84(in Chinese).
[7] DING Y Ch,ZHANG Sh L,LI Y,et al.Experimental study on the self-mixing interference with orthogonal polarized He-Ne light[J].Laser Technology,2004,28(1):33-35(in Chinese).
[8] YU Y G,CHENG M,QIANG X F.Self-mixing interference effects in a multi-mode laser diode[J].Acta Optica of Sinica,2001,21(9):1093-1098(in Chinese).
[9] YU Y G,YAO J Q,YE H Y.A self-mixing interference structures including the pre-feedback used for measuring displacement[J].Acta Optica of Sinica,2002,22(3):308-312(in Chinese).
[10] OZDEMIR S K,SHINOHARA S,ITO S,et al.Compact optical instrument for surface classification using self-mixing interference in a laser diode[J].Opt Engng,2001,40(1):38-43.
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