Grating heterodyne interferometer of high accuracy controlling photoelectric grating ruling engine
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摘要: 为提高光电式光栅刻划机的控制精度,设计了一种自准直式激光光栅外差干涉仪的新型测量系统。以光栅衍射和偏振光学为理论基础,结合电子学的相关知识对系统进行了理论分析,设计了基准光栅,并进行了大量的实验研究。由实验研究可知,这种利用光栅的自准直衍射和以光栅栅距作为计量基准的干涉测量系统,具有受环境因素的影响低,结构简单、装调方便等优点;采用双频激光得到的测量信号增益大,信噪比高;该系统用于光栅刻划,得到的栅线间距刻划偏差优于10nm,在3mm行程内累积误差约为0.3μm。结果表明,该系统具有纳米级分辨力,用于实时测量控制系统,测量误差很小,完全达到了中阶梯光栅等特种光栅对刻划机的高精度分度要求。Abstract: In order to heighten the manipulative accuracy of the ruled engine,a new measurement system auto-collimating grating heterodyne interferometer was proposed.Based on the diffraction and polarization of grating and some theories of the electronics,the system was analyzed.After the benchmark grating was designed,and lots of experiments were carried out.Because the interferometer measurement system takes grating constant as the measurement standard,the effect of environment on measurement accuracy is reduced.Thanks to the auto-collimation diffraction,the structure is simple and steady,and easy to assemble and adjust.Moreover,using the dual-frequency,high gain and signal-to-noise ratio can be obtained.Using the interferometer system to control the ruled engine,the biased error for ruling span is less than 10nm,and the cumulative error is about 0.3μm within 3mm displacement.The results show that the resolution of the interferometer system is small to nm scale,and it can be used in the real-time measurement control system and that it achieves high accuracy that the special diffraction gratings such as echelon gratings request to a ruling engine completely.
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