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双折射晶体厚度干涉测量技术的研究

唐朝伟, 邵艳清, 何国田, 张鹏, 张旭详, 赵丽娟, 傅明怡

唐朝伟, 邵艳清, 何国田, 张鹏, 张旭详, 赵丽娟, 傅明怡. 双折射晶体厚度干涉测量技术的研究[J]. 激光技术, 2008, 32(5): 521-522,530.
引用本文: 唐朝伟, 邵艳清, 何国田, 张鹏, 张旭详, 赵丽娟, 傅明怡. 双折射晶体厚度干涉测量技术的研究[J]. 激光技术, 2008, 32(5): 521-522,530.
TANG Chao-wei, SHAO Yan-qing, HE Guo-tian, ZHANG Peng, ZHANG Xu-xiang, ZHAO Li-juan, FU Ming-yi. Novel interferometry measurement technique for birefringence crystal thickness[J]. LASER TECHNOLOGY, 2008, 32(5): 521-522,530.
Citation: TANG Chao-wei, SHAO Yan-qing, HE Guo-tian, ZHANG Peng, ZHANG Xu-xiang, ZHAO Li-juan, FU Ming-yi. Novel interferometry measurement technique for birefringence crystal thickness[J]. LASER TECHNOLOGY, 2008, 32(5): 521-522,530.

双折射晶体厚度干涉测量技术的研究

详细信息
    作者简介:

    唐朝伟(1966- ),男,博士,副教授,主要研究领域为测控技术、信号与信息处理.E-mail:williancq@163.com

  • 中图分类号: TH744.3

Novel interferometry measurement technique for birefringence crystal thickness

  • 摘要: 为了能精确测量出晶体厚度,利用晶体的双折射特性,采用剪切干涉法来测量双折射晶体的厚度,从理论上推导出其实现的可行性,并结合实验验证了测量系统的具体实现过程及计算厚度的算法。结果表明,该方法可用来测量厚度为厘米量级的双折射晶体的厚度,测量的均方根误差小于20nm。
    Abstract: In order to measure the crystal thickness accurately,a measurement method based on the birefringence characteristics of crystal was proposed and the feasibility was analyzed.Furthermore the realization process of measuring system and arithmetic of calculating thickness was validated by experiments.The experiment result shows that the root mean square of measuring error was less than 20nm.
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出版历程
  • 收稿日期:  2007-07-15
  • 修回日期:  2007-10-24
  • 发布日期:  2008-10-24

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