The effect of photodetector configuration on the photoresponse properties
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摘要: 为了研究不同结构光电探测器的光响应特性,采用脉冲激光沉积技术在玻璃衬底上制备了ZnO基紫外探测器。X射线衍射谱、扫描电子显微镜和光致发光光谱显示,ZnO膜为多晶结构,表面平整,并具有良好的化学配比。比较平面结构探测器和夹层式探测器的光响应特性可知,探测器结构对光电探测特性具有重要影响。结果表明,平面结构探测器中的电极宽度引起响应时间和响应度之间的竞争,而具有透明电极氧化铟锡的夹层式探测器则不存在这一问题。Abstract: In order to study the photoresponse properties of photodetectors with different configuration, the ultraviolet photodetectors were prepared on ZnO substrate by means of pulsed laser deposition (PLD) method.It could be seen that the ZnO film was heteromorphic and had good stoichiometric composition and uniform crystal size of 60nm, under the X-ray diffraction (XRD) pattern, the photoluminescence (PL) spectrum and the scanning electron microscopy (SEM), respectively.After comparing the photoresponse characteristics of the photodetectors with planar electrode configuration and sandwiched electrode configuration,a conclusion can be drawn that the photodetector configuration has a great effect on the response time.Considering the competition between response time and responsivity in planar electrode configuration photodetectors, the sandwiched electrode configuration photodetectors with transparent electrode are preferable.
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Keywords:
- thin film /
- photodetector /
- pulsed laser deposition /
- response characteristic
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