光束参量积对半导体激光器光束质量的评估

Evaluation of beam quality of semiconductor lasers by beam parameter product

摘要: 为了解决传统方法中用光束参量积来评估激光光束质量的不足，基于半导体激光器的光束特性，采用了光束参量积M_q²因子来评估半导体激光器光束质量，进行了理论分析和实验验证，取得了快轴准直焦距（FAC）分别为1100μm和600μm的各6个组合光束以及FAC为600μm的10个组合光束的有效焦距长度数据。结果表明，L_//和θ_⊥的变化越明显，光束质量参量积M_q²因子的变化越明显；测量值和计算值之间的误差小于5%。这一结果对高能激光的光束质量评估是有帮助的。

Abstract: In order to solve the deficiency of the traditional evaluation method of beam parameter product on laser beam quality, based on the characteristics of semiconductor laser beam, the effective focal length data of 6 combined beams of fast axis collimator (FAC) with focal length 1100μm, 6 combined beams of FAC with focal length 600μm, and 10 combined beams of FAC with focal length 600μm were obtained. The theoretical analysis and experimental verification were carried out. The results show that the more obvious the change of L_// and θ_⊥ is, the more obvious the change of beam parameter product of beam quality is. The error between the measured value and the calculated value is generally less than 5%. This result is helpful for evaluating the beam quality of high energy laser.