Abstract: In order to find the effects of different process parameters(laser repetition frequency, laser scanning velocity, laser scanning times) on the dimension and the morphology of composite grooves during laser etching of surface composite grooves on micro heat pipe, a series of experiments were carried out by single factor experimental method. The reasonable process parameters of 1064nm wavelength fiber laser were confirmed. The experimental results show that, under the conditions of 40kHz laser repetition frequency, 150mm/s laser scanning velocity and 25 laser scanning times, composite grooves can provide larger capillary pressure for liquid reflux in micro heat pipe. This study is of great significance to improve the heat transfer performance of grooved micro heat pipes.