Abstract: In order to study the propagation characteristics of shock wave, shock processing of copper films under the different processing parameters was simulated with finite element software. Propagation characteristics of dynamic stress wave in film-substrate system were analyzed by using stress wave theory. The results show that when the laser energy is 30mJ, shock waves are elastic. The maximum velocity of particles in thin film with the single shock is -0.018mm/s, the change of the velocity and the residual strain of particles in films is little with three shocks. When laser energy is 120mJ, shock waves are elastic-plastic. The maximum velocity of particles and the largest depth of the residual strain in the films with three shocks are respectively 26.44% lower and 35.48% higher than those with single shock. These have guiding significance to the study of propagation characteristics of shock wave.