激光扫描制备大尺寸超导薄膜的理论分析

基金项目:

国家自然科学基金

Theoretical analysis for deposition of HTSC films over large area by laser scanning ablation

摘要: 提出了利用激光扫描剥离靶材,沉积膜厚分布均匀的大尺寸高温超导薄膜分析模型。利用这模型取得的结果表明:激光扫描方法沉积的薄膜厚度分布依赖于激光扫描半径、靶面与基片的间距。对于一定均匀性程度要求的薄膜,存在一个能获得最大尺寸薄膜的最佳激光扫描半径。实验结果与理论分析基本一致。
- 大尺寸超导薄膜 /
- 激光扫描沉积
Abstract: A method, laser scanning ablation,for deposition of well-distributed high Tc supercon-ductivity(HTSC)films over large area was presented,and a mathemathtical model for the method was established.By means of mathmatics analysis,it was shown that the distribution of film thickness depended on the laser scanning radius and the distance between substrate and target.Also indicated by the analysis results,there was an optimum scanning radius for achieving a maximum film in the range of requisite uniforinity. And the results were agreed with experiments.
- large size superconducting films /
- laser scanning ablation for deposition

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