100W XeCl准分子激光器的放电特性
Discharge performances of a 100W XeCl excimer laser
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摘要: 通过对一台放电泵浦的100WXeCl准分子激光器进行实验,给出了放电波形和放电能量在激光气体中的耦合情况。Abstract: This paper presents the experimental results of the discharge waveform and energy deposition properties of a 100W XeCl excimer laser.According to these measured data,the energy coupling efficiency of the laser is about 40%.
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