Abstract: For laser cutting thin quartz glass plates precisely,its principle is discussed,how to choose laser cutting equipment is introduced according to the quartz glass' optical transmissivity,i.e.,the laser's wave length should be in 5μm～20μm for laser cutting application.The specimen laser cutting experiments show that it is feasible to cut thin quartz glass plates pricisely with laser cutting technique with accuracy of better than 20μm and central symmetry of less than 3μm.The experimental results and choosing method are helpful for precision quartz laser cutting application and development of laser cutting equipment.