Precision laser cutting technique for thin quartz glass plates
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摘要: 为了实现石英玻璃薄板的激光精密切割,对石英玻璃薄板激光切割原理进行了探讨,提出了依照材料光学透过率特性来选择激光切割用激光源的方法.通过对材料光学透过率的特性分析可以得知,用来切割石英玻璃的激光源波长应在5μm～20μm范围内.对石英玻璃薄板的激光精密切割进行了实验验证,实验结果表明,激光精密切割技术能够较好地运用于石英玻璃薄板的精密切割加工中,其加工精度优于20μm、中心对称度小于μm.这一结果和激光源选择方法对石英材料激光精密加工技术研究及其设备研制是有帮助的.Abstract: For laser cutting thin quartz glass plates precisely,its principle is discussed,how to choose laser cutting equipment is introduced according to the quartz glass' optical transmissivity,i.e.,the laser's wave length should be in 5μm～20μm for laser cutting application.The specimen laser cutting experiments show that it is feasible to cut thin quartz glass plates pricisely with laser cutting technique with accuracy of better than 20μm and central symmetry of less than 3μm.The experimental results and choosing method are helpful for precision quartz laser cutting application and development of laser cutting equipment.
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