离子注入铌酸锂平面波导双折射特性的研究

The theory of correcting the devation of retardation of wave-plate

摘要: 为了获得折射率信息,采用UT00-FPD型椭偏仪对5mm×10mm×1mm铌酸锂晶体及注入镓的铌酸锂晶体波导的双折射特性进行了测量.首先对铌酸锂晶体测量结果进行建模及数据处理,得到晶体在190nm～1700nm之间的双折射特性;在此模型的基础上,进一步对注入镓的铌酸锂晶体波导进行了建模和数据处理,得到了波导层的双折射率的分布.所得表征结果为铌酸锂晶体波导在光子器件中的应用提供了有用的信息.

Abstract: In order to get the information of index of refraction,we measure the properties of birefringence of LiNbO3and LiNbO3 waveguide,using UT300-FPD ellipsometry.Firstly,we made model of LiNbO3 and fit the results,so we have the index of refraction from 190nm~1700nm.Secondly,based on the model of the first step,we readily obtain the model of LiNbO3 waveguide and the distribution of the index of refraction.The work we have done provide useful information for the development of LiNbO3 waveguide as photon devices.