Analysis of characteristics of a lateral shear interferometer for on-machine surface measurement
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摘要: 为探讨和证明双折射晶体激光剪切干涉仪用于在线表面精密测量的可能性,推导了该干涉仪中光传输和实现表面测量的模型,分析了其抗振特性,模拟了相当的振动条件对其抗振特性进行实验测试.分析和实验证明了该干涉仪具有良好的抗振能力,适合应用于在线表面精密测量.Abstract: In order to investigate the possibility of a lateral shear interferometer,which is based on a birefringence crystal shear generator,to be applied to on-machine surface measurement,optical models of the interferometer for light propagation and surface measurement are derived.Its anti-vibration characteristics are analyzed,and a vibration table to simulate different vibration conditions is set up,on which many experiments for surface measurement under different vibration conditions are conducted.The analysis and experimental testing verify the advanced anti-vibration characteristics of the interferometer for on-machine surface measurement.
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