微尺度下新型MEMS滤波器的研究

Design of MEMS coplanar waveguide cavity bandstop filter

摘要: 分析了MEMS共面波导结构,在MEMS共面波导的基础上设计了一种MEMS滤波器,研究了它的电磁学、热应力等微尺度效应.在这些微尺度条件下分析了器件的相关性能,这些参数为获取实际的MEMS滤波器提供了一些有意义的数据.若改变设计参数,可获取其它同类型的带阻、带通滤波器件,为无线通信中的MEMS器件研究在材料选择、器件设计等方面提供了一些理论依据及其实际经验.

Abstract: The MEMS CPW is analyzed,and a novel MEMS designed based on the CPW.The electromagnetism and thermal stress are studied.The parameters of the microscale filter are analyzed,and significant data is obtained for actual MEMS filter.If the design parameters are changed,the different performance of MEMS resonators and filters are obtained.The partial theory and practicality experience of material choice and components design study of wireless communications MEMS devices are provided.