Abstract: To improve a scanning microscope,a new optoelectronic scanning method and device is proposed.The device is based on a liquid crystal display(LCD),to form a phase-most spatial light modulator.The electronic addressed liquid crystal display forms different diffractive optical elements.The phase shift introduced by these elements makes it possible to control the position and focus of the scanning beam.With a LCD used in a scanning microscope,good result is achived,which indicates that the liquid crystal display can be used as the key element of the scanning system of the scanning microscope.