Effect of femtosecond laser parameters on micromachining process
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摘要: 分析了国际上飞秒激光同材料相互作用的实验研究,介绍了飞秒激光加工过程中,各个光参数对加工质量和加工尺寸的影响,针对光参数在飞秒激光加工过程中产生的影响做出了分析。Abstract: The research of material processing with femtosecond laser has been performed in many countries.The development of many kinds of material processing with femtosecond laser in the world is introduced and the optical parameters'effect on the micromahining process is analyzed.
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Keywords:
- femtosecond laser /
- micromaching /
- optical parameters’ effect /
- ablation threshold
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