ZrO2/SiO2棱镜偏振膜的膜系优化设计与制备

The optimum design and preparation of ZrO2/SiO2 polarizing film

摘要: 对以K9玻璃为基底,采用ZrO2和SiO2为高低膜料来制备棱镜偏振膜,并进行膜系优化设计.设计指标为:波长540nm处满足Tp>99%,Ts13H3LH为最佳膜系.测试结果表明,此膜系完全满足设计指标,偏振性能优良.探讨了参考波长对偏振膜工作带宽的影响.

Abstract: The polarizing prism film is optimized using K9 substrate and ZrO2,SiO2 thin film material.Designing aim is Tp>99% and Ts13 H3LH is best for the above design aim.The test shows that the film has excellent polarizing character.Then the influence of reference wavelength on polarizing film is discussed.