薄膜应力激光测量方法分析

基金项目:

国家八六三计划资助项目(2001AA312100)

详细信息

Analysis of laser measurement for thin-film stress

Changchun Institute of Optics, Fine Mechanics and Physics, the Chinese Academy of Sciences, Changchun 130022, China

摘要: 总结了薄膜应力的一些测量方法.分析了利用测量基片弯曲曲率的激光宏观变形分析法———激光干涉法、激光束偏转法的理论依据及其测量原理,计算了各种测量方法的测量精度.激光干涉法的精度可达0.92%,可测量的最小应力值为15.7MPa;激光束偏转法较低,为2.12%,可测量的最小应力值为25.5MPa,空间分辨率低,约为100μm.
- 激光 /
- 薄膜 /
- 应力 /
- 测量
Abstract: Various measurements of thin-film stress are summarized. The basic theory and measuring principle of laser macro deformation analysis (including laser interference measurement and laser beam deflexion measurement) that utilized substrate curvature measurement are analyzed; the precision of different measurements is evaluated. The precision of laser interference measurement nearly reaches 0.92% and the least stress that could be measured is 15.7MPa. Compared to laser interference measurement,the precision of laser beam deflexion measurement is low,it is about 2.12%,the least stress which could be measured is 25.5MPa,and space resolution is low as well,which is approximate 100μm.
- laser /
- thin-film /
- stress /
- measurement

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