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ZnS薄膜脉冲激光沉积及其发光特性

ZnS thin film deposited by pulsed lasers and its luminescent characteristic

  • 摘要: 综述了ZnS的发光机制,脉冲激光沉积(PLD)制备薄膜的原理、特点,分析了在用PLD制备ZnS过程中各主要沉积条件对成膜质量的影响,展望了ZnS薄膜的应用前景。

     

    Abstract: Luminescent mechanism of ZnS and the preparation principle of thin film deposited by pulsed lasers and its chararacteristic are summarized.The deposition parameters affecting the quality of the ZnS thin film during pulsed laser deposition are analysed emphatically.The prospect and potential applications of the film are also tentatively discussed.

     

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